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http://dx.doi.org/10.4313/TEEM.2014.15.6.344

Analysis of Characteristics of DLC Coating Thin Film in Tungsten Carbide for Production of Medical Thermal-Infrared Lenses  

Park, Yong-Pil (Department of Electrical and Electronic Engineering, Dongshin University Graduate School)
Kim, Tae-Gon (Department of Electrical and Electronic Engineering, Dongshin University Graduate School)
Cheon, Min-Woo (Department of Health Administration, Dongshin University)
Publication Information
Transactions on Electrical and Electronic Materials / v.15, no.6, 2014 , pp. 344-347 More about this Journal
Abstract
This study was carried out on DLC thin film deposition technology used in infrared optical system production as a method of reducing the shape changes of the molding core and the consequent loss of life. Experiments on the deposition on silicon wafer and tungsten carbide used as a substrate for molding core were conducted at each processing condition using a filtered arc system, and it was found that the surface and mechanical properties were of the greatest quality when the substrate bias voltage of -150 V was used. In addition, it was confirmed that the PV and Ra characteristics were improved by the deposition of the DLC thin film.
Keywords
DLC; Thin film; Tungsten carbide; Optical lens;
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