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http://dx.doi.org/10.4313/TEEM.2013.14.1.9

Properties of AZO/Ag/AZO Multilayer Thin Film Deposited on Polyethersulfone Substrate  

Jung, Yu Sup (Department of Electrical Engineering, Gachon University)
Park, Yong Seo (Department of Electrical Engineering, Gachon University)
Kim, Kyung Hwan (Department of Electrical Engineering, Gachon University)
Lee, Won-Jae (Department of Electronic Engineering, Gachon University)
Publication Information
Transactions on Electrical and Electronic Materials / v.14, no.1, 2013 , pp. 9-11 More about this Journal
Abstract
The AZO/Ag/AZO multilayer films were deposited on polyethersulfone (PES) substrate by using facing target sputtering methods at room temperature. The AZO/Ag/AZO multilayer films with polymer substrate had advantages, such as low sheet resistance, high optical transmittance in visible range and stable mechanical properties. From the results, the AZO/Ag/AZO multilayer films (50/12/50 nm) demonstrated a sheet resistance of 11 ${\Omega}/{\square}$ and average transmittance of 87% in visible range (wavelength of 380-770 nm). Moreover, the multilayer showed stable mechanical properties compared to the single-layered AZO sample during the bending test due to the existence of the ductile Ag metal layer.
Keywords
AZO/Ag/AZO; Multilayer; Polyethersulfone; Facing target sputtering;
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