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http://dx.doi.org/10.4313/TEEM.2011.12.5.222

Fabrication of 1 ㎛ Thickness Lead Zirconium Titanate Films Using Poly(N-vinylpyrrolidone) Added Sol-gel Method  

Oh, Seung-Min (Electronic Materials Center, Korea Institute of Science and Technology, Department of Materials Science and Engineering, Korea University)
Kang, Min-Gyu (Electronic Materials Center, Korea Institute of Science and Technology)
Do, Young-Ho (Electronic Materials Center, Korea Institute of Science and Technology)
Kang, Chong-Yun (Electronic Materials Center, Korea Institute of Science and Technology)
Yoon, Seok-Jin (Electronic Materials Center, Korea Institute of Science and Technology)
Nahm, Sahn (Department of Materials Science and Engineering, Korea University)
Publication Information
Transactions on Electrical and Electronic Materials / v.12, no.5, 2011 , pp. 222-225 More about this Journal
Abstract
Lead zirconate titanate (PZT) films were fabricated on Pt/Ti/$SiO_2$/Si substrate by the sol-gel method using a sol containing poly(N-vinylpyrrolidone) (PVP). PVP in alkoxide solutions can suppress the condensation reaction in gel films during heat treatment, and increase the viscosity of alkoxide solutions. Single-phase PZT films as thick as 1 ${\mu}m$ were deposited by repetitive coating with successive third-step heat treatments at 150$^{\circ}C$, 350$^{\circ}C$ and 650$^{\circ}C$. After heat treatment, the films were crack free, and optically transparent. As a result, we demonstrated a PZT film with a PVP molar ratio of 0.5, which has a permittivity of 734, a dielectric loss of 0.042, a $P_r$ of 40.5 ${\mu}C/cm^2$ and an $E_c$ of 156 kV/cm.
Keywords
Lead zirconate titanate; Thickness control; Poly(vinylpyrrolidone); Sol-gel;
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