Analysis of Novel Helmholtz-inductively Coupled Plasma Source and Its Application for Nano-Scale MOSFETs |
Park, Kun-Joo
(DMS co., Ltd)
Kim, Kee-Hyun (DMS co., Ltd) Lee, Weon-Mook (DMS co., Ltd) Chae, Hee-Yeop (Department of Chemical Engineering, SungKyunKwan University) Han, In-Shik (Department of Electronics Engineering, Chungnam National University) Lee, Hi-Deok (Department of Electronics Engineering, Chungnam National University) |
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