Influence of Nitrogen/argon Flow Ratio on the Crystallization of Hafnium Oxynitride Films |
Choi, Dae-Han
(School of Materials Science and Engineering, University of Ulsan)
Choi, Jong-In (School of Materials Science and Engineering, University of Ulsan) Park, Hwan-Jin (School of Materials Science and Engineering, University of Ulsan) Chae, Joo-Hyun (School of Materials Science and Engineering, University of Ulsan) Kim, Dae-Il (School of Materials Science and Engineering, University of Ulsan) |
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