The Properties of HfO2 Thin Films by DC/RF Magnetron Sputtering and Thermal Evaporation Method |
Jeong, Woon-Jo
(Optical Engineering Research Institute, Mokpo National University)
Ahn, Ho-Geun (Department of Chemical Engineering, Sunchon National University) Kim, Young-Jun (Department of Electrical Engineering, Mokpo National University) Yang, Hyeon-Hun (Department of Electrical Engineering, Mokpo National University) Park, Gye-Choon (Department of Electrical Engineering, Mokpo National University) |
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