The Properties of HfO2 Thin Films by DC/RF Magnetron Sputtering and Thermal Evaporation Method |
Jeong, Woon-Jo
(Optical Engineering Research Institute, Mokpo National University)
Ahn, Ho-Geun (Department of Chemical Engineering, Sunchon National University) Kim, Young-Jun (Department of Electrical Engineering, Mokpo National University) Yang, Hyeon-Hun (Department of Electrical Engineering, Mokpo National University) Park, Gye-Choon (Department of Electrical Engineering, Mokpo National University) |
1 | C. J. Huang, T. H. Meen, M. Y. Lai, and W. R. Chen, 'Formation of Culnxe, thin films on flexible substrates by electrodeposition (ED) technique', Solar Energy Materials & Solar Cells, Vol. 82, p. 553,2004 |
2 |
H. Miyazakia, R. Mikamia, A. Yamadab, and M. Konagaia, |
3 | J. Bekker, V. Alberts, and M. Witcomb, 'Influence of selenization techniques on the reaction kinetics of chalcopyrite thin films', Thin Solid Films, Vol. 387, p. 40, 2001 |
4 | M. A. Contreras, B. Egass, K. Ramanathan, J. U. Hiltner, A. Swartzlander, F. Hasoon, and R. Noufi, 'Prog. In Photovoltaics', Short Communication, p 35, 1999 |
5 | F. H. Kang, 'Development and Manufacturing of CIS Thin Film Solar Modules', Technical Digest of the Int'l PVSEC-11, Hokkaido, Japan, p. 627, 1999 |
6 | F. O. Adurodija, M. J. Carter, and R. Hill, 'Solidliquid reaction mechanisms in the formation of high quality CulrrSe, by the stacked elemental layer (SEL) technique', Solar Energy Materials & Solar Cells, Vol. 37, p. 203, 1995 |
7 | R. Noufi, R. L. Matson, R. C. Powell, and C. Harrington, 'Solar Cell', p. 479, 1986 |
8 | S. Zweigart, D. Schmid, J. Kessler, H. Dittrich, and H. W. Schock, 'Studies of the growth mechanism of polycrystalline Culnxe, thin films prepared by a sequential process', Journal of Growth, Vol. 146, p. 233, 1995 |
9 | S. Yamanaka, M. Konagai, and K. Takahashi, 'Characterization of copper indium diselenide thin films by raman scattering spectroscopy for solar cell applications', Japanese Journal of Applied Physics, Vol. 28, No.8, p. L1337, 1989 DOI |
10 | K. Bindu, C. Sudha Kartha, and K. P. Vijayaumar, 'Culnxe, thin film preparation through a new', Solar Energ, Vol. 79, p. 67,2003 |
11 |
L. Zhang, F. D. Jiang, and J. Y. Feng, 'Formation of |
12 | T. Pisarkiewicz and H. Jankowski, 'Vacuum selenization of metallic multilayers for CIS solar cells', Vacuum, Vol. 70, p. 435, 2003 DOI ScienceOn |
13 |
Xs. Mrsillac, S. Dorn, R. Rodheleau, and E. Miller, 'Low-temperature deposition of |
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