Experimental and Numerical Analysis of A Novel Ceria Based Abrasive Slurry for Interlayer Dielectric Chemical Mechanical Planarization |
Zhuanga, Yun
(Araca Incorporated)
Borucki, Leonard (Araca Incorporated) Philipossian, Ara (Araca Incorporated) Dien, Eric (Kemesys) Ennahali, Mohamed (Kemesys) Michel, George (Kemesys) Laborie, Bernard (Kemesys) Zhuang, Yun (Department of Chemical and Environmental Engineering, University of Arizona) Keswani, Manish (Department of Chemical and Environmental Engineering, University of Arizona) Rosales-Yeomans, Daniel (Department of Chemical and Environmental Engineering, University of Arizona) Lee, Hyo-Sang (Department of Chemical and Environmental Engineering, University of Arizona) Philipossian, Ara (Department of Chemical and Environmental Engineering, University of Arizona) |
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