Polishing Mechanism of TEOS-CMP with High-temperature Slurry by Surface Analysis |
Kim, Nam-Hoon
(Research Institute of Energy Resources Technology, Chosun University)
Seo, Yong-Jin (Department of Electrical and Electronic Engineering, Daebul University) Ko, Pil-Ju (Department of Electrical Engineering, Chosun University) Lee, Woo-Sun (Department of Electrical Engineering, Chosun University) |
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