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http://dx.doi.org/10.4313/TEEM.2005.6.4.149

Analysis of ITO on Polymer Substrate by External Bending Force  

Han, Jin-Woo (Department of Electrical & Electronic Engineering, Yonsei University)
Kim, Young-Hwan (Department of Electrical & Electronic Engineering, Yonsei University)
Kim, Jong-Hwan (Department of Electrical & Electronic Engineering, Yonsei University)
Hwang, Jeoung-Yeon (Department of Electrical & Electronic Engineering, Yonsei University)
Seo, Dae-Shik (Department of Electrical & Electronic Engineering, Yonsei University)
Publication Information
Transactions on Electrical and Electronic Materials / v.6, no.4, 2005 , pp. 149-153 More about this Journal
Abstract
In this paper, we investigated the island density-dependent stress distribution of indium-tin-oxide (ITO) film on polycarbonate substrate by external bending force. We used e-beam and RF­sputter for SiON, ITO sputtering. It was found that there are influence of island density on the substrate and decreasing crack density as goes to the minimum density. From the result that crack density was increasing at maximum island density, it is evident that more stress is imposed on same island position as island density.
Keywords
Residual stress; Multilayer; External stress; Bending;
Citations & Related Records
Times Cited By KSCI : 1  (Citation Analysis)
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1 S.-K. Park, J.-I. Han, D.-G. Moon, and W.-K. Kim, 'Improvement of mechanical property of indium-tinoxide films on polymer substrates by using organic buffer layer', Trans. EEM, Vol. 3. No.2, p. 32, 2002
2 J.-B. Park, J.-Y. Hwang, D.-S. Seo, S.-K. Park, D.-G. Moon, and J.-I. Han, 'Position dependent stress distribution of indium-tin-oxide on polymer substrate by external bending force', Jpn. J. Appl. Phys., Vol. 43, No, 5A, p. 2677, 2004   DOI
3 C. H. Hsueh, 'Modeling of elastic deformation of multilayer due to residual stresses and external bending', J. Appl. Phys., Vol. 91, No. 12, p. 9652, 2002   DOI   ScienceOn
4 H.-H. Kim, M.-J. Cho, W.-J. Choi, J.-G. Lee, and K. J. Lim, 'Figure of merit for deposition conditions in ITO Films', Trans. EEM, Vol. 3. No.2, p. 6, 2002
5 D. R. Cairns, R. P. Witte II, D. K. Sparacin, S. M. Sachsman, D. C. Paine, G. P. Crawford, and R. R. Newton, 'Strain-dependent electrical resistance of tindoped indium oxide on polymer substrate', Appl. Phys. Lett., Vol. 76, No. 11, p. 1425, 2000
6 M. Yanaka, Y. Tsukahara, T. Okabe, and N. Takeda, 'Statistical analysis of multiple cracking phenomenon of a $SiO_x$), thin film on a polymer substrate', J. Appl. Phys., Vol. 90, No.2, p. 713, 2001
7 Z. Suo, E. Y. Ma, H. Gleskova, and S. Wagner, 'Mechanics of rollable and foldable film-on-foil electronics', Appl. Phys. Lett., Vol. 74, No.8, p. 1177, 1999