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http://dx.doi.org/10.4313/TEEM.2005.6.1.010

Crystallization and Electrical Properties of SBN60 Thin Films Prepared by Ion Beam Sputter Deposition  

Jang, Jae-Hoon (Department of Materials Science and Engineering, Yeungnam University)
Jeong, Seong-Won (Department of Materials Science and Engineering, Yeungnam University)
Lee, Hee-Young (Department of Materials Science and Engineering, Yeungnam University)
Publication Information
Transactions on Electrical and Electronic Materials / v.6, no.1, 2005 , pp. 10-13 More about this Journal
Abstract
$Sr_{0.6}Ba_{0.4}Nb_{2}O_{6}$, hereafter SBN60, thin films of 300 nm thickness were deposited using ion beam sputtering technique, in which sintered ceramic target of the same composition was utilized and the $Ar:O_{2}$ gas ratio was controlled during deposition onto $Pt(100)/TiO_{2}/SiO_{2}/Si$ substrate. Crystallization and orientation behavior as well as electrical properties of the films were examined after annealing treatment at $650{\sim}800{\cric}C$. It was found that the film orientation was dependent upon $Ar:O_{2}$ratio, in which strong (00l) orientation was developed when the gas ratio was about 1:4 at $4.3{\times}10^{-4}$ torr. Typical remanent polarization (2Pr), the coercive field (Ec) and the dielectric constant of Pt/SBN60/Pt thin film capacitor were approximately $10{\mu}C/cm^{2}$, 60 kV/cm, and 615, respectively.
Keywords
SBN; Ion beam sputtering; Ferroelectric thin film; Tungsten bronze structure;
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1 Y. Xu, C. J. Chen, R. Xu, and J. D. Mackenzie, 'Ferroelectric $Sr_{0.6}Ba_{0.3}Nb_20_6$ thin film by the sol-gel process: Electrical and optical properties', Phys. Rev. B, Vol. 44, No.1, p. 35, 1991
2 Y. Xu, 'Ferroelectric materials and their application', North Holland, Amsterdam, p. 254, 1991
3 M. D. Ewbank, R. R. Neurgaonkar, W. k. Cory, and J. Feinberg, 'Photorefractive properties of strontium- barium niobate', J. Appl. Phys., Vol. 62(2), p. 374, 1987
4 R. B. Maciolek and S. T. Liu, 'Preparations and properties of low loss $Sr_{1-x}Ba_xNb_2O_6$ ferroelectric single crystals', J. Electron. Mater., Vol. 2, No.2, p. 191, 1973   DOI   ScienceOn
5 R. R. Neurgaonkar, M. H. Kalisher, T. C. Lim, E. J. Staples, and K. I. Keester, 'Czochralski single crystal growth of $Sr_{0.61}Ba_{0.39}Nb_20_6$ for surface acoustic wave applications', Mater. Res. Bull., Vol. 15, No.9, p. 1235, 1980
6 P. B. Jamieson, S. C. Abrahams, and J. L. Bernstein, 'Ferroelectric tungsten bronze-type crystal structures. I. Barium strontium niobate $Ba_{0.27}Sr_{0.75}Nb_2O_{5.78}$', J. Chem. Phys., Vol. 48, No. 11, p. 5048, 1968.
7 K. H. Hellwege and A. M. Hellwege(eds.), 'Landolt-bomstein new series', Group Ill, Vol. 28a, p. 148, 1988
8 M. P. Trubelja, E. Ryba, and D. K. Smith, 'A study of positional disorder in strontium barium nibate', J. Mater. Sci., Vol. 31, No.6, p. 1435,1996
9 S. S. Thony, K. E. Youden, J. S. Harris, Jr., and L. Hesselink, 'Growth of epitaxial strontium barium niobate thin film by pulsed laser deposition', Appl. Phys. Lett., Vol. 65, No. 16, p. 2018,1994
10 C. H. Luk, M. M. T. Ho, C. L. Mak, K. J. Wong, and G. K. H. Pang, 'Fabrication and structural properties of sol-gel derived SBN films', J. Eur. Ceram. Soc., Vol. 19, No. 6-7, p. 1443, 1999
11 C.-A. Jong and J.-Y. Gan, 'Crystallization of $Sr_{0.5}Ba_{0.5}Nb_20_6$ thin films on La$NiO_3$ electrodes by RF magnetron reactive sputtering', Jpn. J. Appl. Phys., Vol. 39, No. 2A, p. 545, 2000
12 M. K. Ryu, S. H. Lee, H. J. Joo, J. P. Kim, M. S. Jang, and Y. S. Yang, 'Electronic defect characteristic of ferroelectric $Sr_{0.25}Ba_{0.75}Nb_20_6$ thin films', Ferroelectrics, Vol. 260, No. 1-4, p. 99, 2001
13 D. G. Lee, H. W. Lee, H. Y. Lee, J.-J. Kim, and S.H. Cho, 'The crystallization behavior of $(Sr,Ba)Nb_20_6$ thin films prepared by a hybrid metalorganic decomposition', Ferroelectrics, Vol. 270, p. 33, 2002
14 C. A. P. de Araujo, J. F. Scott, and G. W. Taylor (eds.), 'Ferroelectric Thin Films: Synthesis and Basic Properties', Gordon and Breach, New York, p. 393, 1996
15 K. Tanaka, O. Nakagawara, M. Nakano, T. Shimuta, H. Tabata, and T. Kawai, 'Epitaxial growth of $(Sr.Ba)Nb_20_6$ thin films by pulsed laser deposition', Jpn. J. Appl. Phys., Vol. 37, No. 11, p. 6142, 1998
16 J. Koo, J. H. Jang, and B.-S. Bae, 'Preparation and characteristics of seeded epitaxial $(Sr,Ba)Nb_20_6$ optical waveguide thin films using sol-gel method', J. Mat. Res., Vol. 16, No.2, p. 430, 2001