Browse > Article
http://dx.doi.org/10.4313/TEEM.2004.5.1.034

2-Dimensional Holographic Grating Formation in Chalcogenide Thin Films  

Lee, Jung-Tae (Department of Electronic Materials Engineering, Kwangwoon University)
Yeo, Choel-Ho (Department of Electronic Materials Engineering, Kwangwoon University)
Chung, Hong-Bay (Department of Electronic Materials Engineering, Kwangwoon University)
Publication Information
Transactions on Electrical and Electronic Materials / v.5, no.1, 2004 , pp. 34-37 More about this Journal
Abstract
Amorphous chalcogenide thin films, especially a-(Se, S) based films, exhibit a number of photo-induced phenomena. In this study, we make the As$\_$40/Ge$\_$10/Se$\_$15/S$\_$35//Ag thin film and then we measure the holographic diffraction efficiency according to thickness of Ag. And we form the two-dimensional holographic grating. At first, we formed one-dimensional grating and then we form two-dimensional grating by rotate the sample. We found out the most suitable thickness of Ag and in case of As$\_$40/Ge$\_$10/Se$\_$15/S$\_$35//Ag(600${\AA}$), the diffraction efficiency was more higher than other samples. The holographic grating was formed by He-Ne laser(λ=632.8nm). The intensity of incident beam was 2.5mW and incident angle was 20$^{\circ}$. We confirm. the two-dimensional holographic grating by the pattern of diffracted beam and AFM(Atomic Force Microscope) image. We perform the etching process using by 0.26N NaOH in order to confirm clearly two-dimensional grating.
Keywords
As$_{}$ 40/Ge$_{}$ 10/Se$_{}$ 15/S$_{}$ 35//Ag; Holographic grating; Diffraction efficiency; Etching process;
Citations & Related Records
연도 인용수 순위
  • Reference
1 H. B. Chung, H. Y, Lee, J. Y. Chun and C. H. Yeo, 'Photoinduced dichroism and its low-temperature characteristics in obliquely deposited amorphous As-Ge-Se-S thin films' J. of Vac. Sci. Tech. A, Vol. 18, No.2, p. 485, 2000   DOI   ScienceOn
2 H. B. Chung, H. Y. Lee, S. H. Park, and J. Y. Chun., 'Photo-induced transformation in amorphous Se75Ge25 thin films by XeCI excimer laser exposure' J. Appl. Phys., Vol. 83(10), p. 5381, 1998   DOI   ScienceOn
3 G. J. Adriaenssens, V. K. Tikhomirov, and S. R. Elliott, 'Mechanism and kinetics of photoinduced anisotropy in chalcogenide glasses', J. NonCryst. Solids, Vol. 227-230, p. 688, 1998   DOI   ScienceOn
4 M. Chang and T. Hou, 'Diffraction efficiency of continuously etched grating in $As_2S_3$ films', Optics Commun, Vol. 24, p. 220, 1978   DOI   ScienceOn
5 J. H. Park, J. I. Park, S. W. Na, C. H. Son, K. Shin, Y. J. Lee, and H. B. Chung, 'Etching Characteristics of holographic grating on chalcogenide As-Ge-Se-S thin films', Proc. 2001 Summer Conf. KIEEME, p. 644,2001
6 C. H. Yeo, S. W. Na, K. Shin, J. I. Park, and H. B. Chung, 'Characteristics of the Photoinduced Anisotropy in Ag/AsGeSeS Multilayer Thin Films', J. of KIEEME(in Korean), Vol. 16, No.2, p. 144, 2003
7 E. Yablonovitch, 'Photonic band-gap structures', J. Opt. Soc. Am. B 10, p. 283, 1993
8 J.D. Joannopoulos, J.N. Winn, R.D. Meade, 'Photonic Crystals; Molding the Flow of Light', Princeton Univ. Press, 1995
9 C. M. Soukoulis, 'Photonic Band Gaps Localization', Plenum, New York, 1993
10 C. H. Yeo, S. J. Jang, J. I. Park, H. Y. Lee, and H. B. Chung, "The measurement on diffraction efficiency in polarization holography using amorphous chalcogenide thin films", J. of KIEEME(in Korean), Vol. 12, No. 12, p. 1192, 1999