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http://dx.doi.org/10.4313/TEEM.2002.3.2.032

Improvement of Mchanical Property of Indium-tin-oxide Films on Polymer Substrates by using Organic Buffer Layer  

Park, Sung-Kyu (Display Research Center, Korea Electronics Technology Institute)
Han, Jeong-In (Display Research Center, Korea Electronics Technology Institute)
Moon, Dae-Gyu (Display Research Center, Korea Electronics Technology Institute)
Kim, Won-Keun (Display Research Center, Korea Electronics Technology Institute)
Publication Information
Transactions on Electrical and Electronic Materials / v.3, no.2, 2002 , pp. 32-37 More about this Journal
Abstract
This paper gives the basic mechanical properties of indium-tin-oxide (ITO) films on polymer substrates which are exposed to externally and thermally induced bending force. By using modified Storney formula including triple layer structure and bulge test measuring the conductive changes of patterned ITO islands as a function of bending curvature, the mechanical stability of ITO films on polymer substrates was intensively investigated. The numerical analyses and experimental results show thermally and externally induced mechanical stresses in the films are responsible for the difference of thermal expansion between the ITO film and the substrate, and leer substrate material and its thickness, respectively. Therefore, a gradually ramped heating process and an organic buffer layer were employed to improve the mechanical stability, and then, the effects of the buffer layer were also quantified in terms of conductivity-strain variations. As a result, it is uncovered that a buffer layer is also a critical factor determining the magnitude of mechanical stress and the layer with the Young's modulus lower than a specific value can contribute to relieving the mechanical stress of the films.
Keywords
SI transition; BSCCO; Mixed crystal; Thin film; KT transition;
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Times Cited By KSCI : 4  (Citation Analysis)
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1 P. M. Smith, P. G. Carey, and T. W. Sigmon, 'Excimer laser crystallization and doping of silicon films on plastic substrate', Appl. Phys. Lett, Vol. 70,p.342,1997   DOI   ScienceOn
2 J. H. Schon, A. Dodabalapur, Ch. Kloc, and B. Batlogg, 'Ambipolar Pentance Field-Effect Tran-sistor and Inverters', Science, Vol. 290, 'p. 963, 2000   DOI   ScienceOn
3 H. Klauk, D. J. Gundlach, M. Bonse, C. C Kuo, and T. N. Jackson, 'A reduced complexity process for organic thin film transistor', Appl. Phys. Lett., Vol. 76,p.1692, 2000   DOI   ScienceOn
4 S. K. Park, J. I. Han, W. K. Kim, and M. G. Kwak, 'Deposition of indium-tin-oxide films on polymer substrates for application on plastic-based flat panel display', Thin Solid Films, Vol. 397, p. 49, 2001   DOI   ScienceOn
5 S. K. Park, J. I. Han, W. K. Kim, and M. G. Kwak, 'Chip Bonding Technology on Non-rigid and Flexible Polymer Substrates with New Stepp Processes', Jpn. J. Appl. Phys., Vol. 40, p. 41 2001   DOI   ScienceOn
6 S. K. Park, J. I. Han, W. K. Kim, and M. G. Kwe 'Mechanics of indium-tin-oxide films on polyrr substrate with organic buffer layer', Mat. Res. So Vo1. 685E, p.N 5.5, 2001
7 I. S. Kim, S. J. Jeong, J. S. Song, M. S. Yun, and C. H. Park, 'A study on the dielectric and annealing properties in Au / $Ta_2O_5$ / Pt MIM capacitor', J. of KIEEME(in Korean), Vol. 12, p. 1016, 1999
8 N. D. Young, G. Harkin, R. M. Bunn, D. J. Mc-Culloch, R. W. Wilks, and A. G KanpP, 'Novel fingerprint scanning arrays using polysilicon TFT's on glass and polymer substrate', IEEE Electron. Dev. Lett., Vol. 18, p. 19, 1997   DOI   ScienceOn
9 D. S. Seo and T. K. Park, 'Investugation ofwashing process on surface liquid crystal alignment and polar anchoring energy in NLC on rubbed poly-imide surfaces', J. of KIEEME(in Korean), Vol. 12, p.1180, 1999
10 D. K. Bae, S. K. Kim, S. K. Lee, I. H. Jung, and J. U. Lee, 'Dielectric breakdown phenomenon of the interface between epoxy/EPDM', J. of KIEEME(in Korean),Vo1. 12, p. 1164, 1999
11 Z. Suo, E. Y. Ma, H. Gleskova, and S. Wagner, "Mechanics of rollable and flodable film-on-foil electrodes', Appl. Phys. Lett., Vol. 74, p. 1177, 1999   DOI   ScienceOn
12 D. R. Caims, R. P. Witte, D. K. Sparacin, and S. M. Sachsman, 'Strain-dependent electrical resistance of tin-doped indium oxide on polymer substrates', Appl. Phys. Lett., Vol. 76, p. 1425, 2000   DOI   ScienceOn
13 M. Yanaka, Y. Tsukahara, T. Okabe, and N. Takeda, 'Statistical analysis of multiple cracking pheno-menon of a $SiO_x$ thin film on a polymer substrate', J. Appl. Phys., Vol. 90, p. 713, 2001   DOI   ScienceOn
14 R. D. jakaha, B. I. Chandran, M.H.Gordon, a W.F.Schmidt, 'Determination of Young's modul of thin films used in embedded passive device Proc. ECTC., p. 745, 1997