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http://dx.doi.org/10.5573/JSTS.2008.8.1.040

Small Molecular Organic Nonvolatile Memory Cells Fabricated with in Situ O2 Plasma Oxidation  

Seo, Sung-Ho (Nano-SOI Process Laboratory, Hanyang University)
Nam, Woo-Sik (Nano-SOI Process Laboratory, Hanyang University)
Park, Jea-Gun (Nano-SOI Process Laboratory, Hanyang University)
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Abstract
We developed small molecular organic nonvolatile $4F^2$ memory cells using metal layer evaporation followed by $O_2$ plasma oxidation. Our memory cells sandwich an upper ${\alpha}$-NPD layer, Al nanocrystals surrounded by $Al_2O_3$, and a bottom ${\alpha}$-NPD layer between top and bottom electrodes. Their nonvolatile memory characteristics are excellent: the $V_{th},\;V_p$ (program), $V_e$ (erase), memory margin ($I_{on}/I_{off}$), data retention time, and erase and program endurance were 2.6 V, 5.3 V, 8.5 V, ${\approx}1.5{\times}10^2,\;1{\times}10^5s$, and $1{\times}10^3$ cycles, respectively. They also demonstrated symmetrical current versus voltage characteristics and a reversible erase and program process, indicating potential for terabit-level nonvolatile memory.
Keywords
Organic nonvolatile memory; ${\alpha}$-NPD; $O_2$ plasma; Al nanocrystals;
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