[KSCI] Korea Science Citation Index Service

Fabrication of 3D Microstructures with Single uv Lithography Step

Han, Man-Hee (Department of Mechanical Engineering, Pohang University of Science and Technology)
Lee, Woon-Seob (Department of Mechanical Engineering, Pohang University of Science and Technology)
Lee, Sung-Keun (Department of Mechanical Engineering, Pohang University of Science and Technology)
Lee, Seung S. (Department of Mechanical Engineering, Pohang University of Science and Technology)

Publication Information

JSTS:Journal of Semiconductor Technology and Science / v.2, no.4, 2002 , pp. 268-272 More about this Journal

Abstract

This paper presents a novel microfabrication technology of 3D microstructures with inclined/rotated UV lithography using negative photoresist, SU-8. In some cases, reflected UV as well as incident UV is used to form microstructures. Various 3D microstructures are simply fabricated such as embedded channels, bridges, V-grooves, truncated cones, and so on.

Keywords

3D microstructure; SU-8; inclined/rotated UV lithography; reflected UV;

Citations & Related Records

Reference

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