Position Control of Magnetic Levitation Transfer System by Pitch Angle

Magnetic levitation transfer systems are useful for transfer tools in clean rooms and positioning control systems with high precision because of frictionless characteristics. In this paper, the new method is proposed which is a sensorless position. At first, the magnetic levitation is performed by state feedback control with a disturbance observer for each of six axes of the movement of a levitated vehicle. The position of the vehicle is then estimated as the disturbance term of a disturbance observer for a pitch angle which is one of the control axes for the magnetic levitation. In addition, the positioning force is generated by the pitch angle control which gives a tilt to the levitated vehicle so that it generates the horizontal component of force.