Analysis of resin flow during nano-imprinting lithographic process |
Kang, J.H.
(School of Mechanical and Aerospace Engineering, Seoul National University)
Kim, S.M. (School of Mechanical and Aerospace Engineering, Seoul National University) Woo, Y.S. (School of Mechanical and Aerospace Engineering, Seoul National University) Lee, W.I. (School of Mechanical and Aerospace Engineering, Seoul National University) |
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