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Growth of and Oxygen-Flow Influence on ZnO Layers Grown by Using RF Magnetron Sputtering  

Park, D.S. (School of Semiconductor and Chemical Engineering, Semiconductor Physics Research Center (SPRC), Chonbuk National University)
Yu, J.H. (School of Semiconductor and Chemical Engineering, Semiconductor Physics Research Center (SPRC), Chonbuk National University)
Kim, J.H. (School of Semiconductor and Chemical Engineering, Semiconductor Physics Research Center (SPRC), Chonbuk National University)
Jeong, T.S. (School of Semiconductor and Chemical Engineering, Semiconductor Physics Research Center (SPRC), Chonbuk National University)
Youn, C.J. (School of Semiconductor and Chemical Engineering, Semiconductor Physics Research Center (SPRC), Chonbuk National University)
Hong, K.J. (Department of Physics, Chosun University)
Publication Information
Journal of the Korean Physical Society / v.53, no.6, 2008 , pp. 3250-3254 More about this Journal
Keywords
ZnO; Growth; Oxygen influence; Characterization; RF magnetron sputtering
Citations & Related Records
Times Cited By KSCI : 3  (Citation Analysis)
Times Cited By Web Of Science : 1  (Related Records In Web of Science)
Times Cited By SCOPUS : 0
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