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http://dx.doi.org/10.3807/JOSK.2016.20.4.524

In-Line Hologram for Plasma Diagnostics  

Kim, Byungwhan (Department of Electrical Engineering, Sejong University)
Jung, Jin-Su (Department of Electrical Engineering, Sejong University)
Publication Information
Journal of the Optical Society of Korea / v.20, no.4, 2016 , pp. 524-529 More about this Journal
Abstract
Diagnostic sensors are demanded during plasma processes. Holograms of plasma taken with laser light without a reference beam were used to monitor behaviors of charged particles produced in nitrogen plasma as a function of electrode temperature ranging between 50 and 300℃. Holograms were characterized as a function of the pixel sum and grayscale value. Pixel sum calculated in identified grayscale ranges strongly correlated with ion density and emitted light intensity measured with a langmuir probe and optical emission spectroscopy, respectively. The performance was further evaluated with data acquired as a function of N2 and NH3 flow rates and improved correlations were observed in the new grayscale range. The confirmed correlations indicate that a hologram is a viable means to diagnose behaviors of plasma particles such as ions. Underlying principles are discussed in view of particle and charge composing vacuum and light.
Keywords
Plasma; Vacuum; Laser; Light; Hologram;
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