1 |
H. Kinoshita, T. Harada, M. Nakasuji, Y. Nagata, and T. Watanabe, “Development of coherent scatterometry microscope,” Mic. Eng. 88, 2000-2003 (2011).
DOI
|
2 |
K. Kim, J. Jo, M. Park, B. Ju, S. Cho, and J. Son, “Coherent scattering stereoscopic microscopy for mask inspection of extreme ultra-violet lithography,” Proc. SPIE 8738, 8738OZ (2013), http://dx.doi.org/10.1117/12.2018588.
DOI
|
3 |
J. A. Rodriguez, R. Xu, C. C. Chen, Y. F. Zou, and J. W. Miao, “Oversampling smoothness: an effective algorithm for phase retrieval of noisy diffraction intensities,” J. Appl. Crystal. 46, 312-318 (2013).
DOI
|
4 |
J. R. Fienup, “Phase retrieval algorithms: a comparison,” Appl. Opt. 21, 2758-2769 (1982), http://dx.doi.org/10.1364/AO.21.002758.
DOI
|
5 |
T. Harada, M. Nakasuji, T. Kimura, Y. Nagata, T. Watanabe, and H. Kinoshita, “The coherent EUV scatterometry microscope for actinic mask inspection and metrology,” Proc. SPIE 8081, 80810K (2011).
|
6 |
A. Tchikoulaeva, H. Miyai, T. Suzuki, K. Takehisa, H. Kusunose, T. Yamane, T. Terasawa, H. Watanabe, S. Inoue, and I. Mori, “EUV actinic blank inspection: from prototype to production,” Proc. SPIE 8679, 86790I (2013), http://dx.doi.org/10.1117/12.2011776.
|
7 |
M. S. Yi, T. Haga, C. Walton, and J. Bokor, “High sensitivity actinic detection of native defects on extreme ultraviolet lithography mask blanks,” J. Vac. Sci. & Tech. B 19, 2401-2405 (2001).
DOI
|
8 |
W. Kim and N. Kim, “Closed-form algorithms for phase retrieval with an additive point signal,” Opt. Express 17, 528-537 (2009).
DOI
|
9 |
W. Kim and Y. You, “Deterministic phase retrieval for determination of a simple defect in L/S type mask inspection,” in Proc. SCS’14 (Prague, Czech Republic, 2014), pp. 44-47.
|
10 |
W. Kim and M. H. Hayes, “Phase retrieval using two Fourier transform intensities,” J. Opt. Soc. Am. A 7, 441-449 (1990).
DOI
|
11 |
M. Guizar-Sicairos and J. R. Fienup, “Holography with extended reference by autocorrelation linear differential operation,” Opt. Express 15, 17592-17612 (2007).
DOI
|
12 |
L. S. Taylor, “The phase retrieval problem,” IEEE Trans. Antennas Propag. 29, 386-391 (1981).
DOI
|
13 |
S. G. Podorov, K. M. Pavlov, and D. M. Paganin, “A non-iterative reconstruction method for direct and unambiguous coherent diffractive imaging,” Opt. Express 15, 9954-9962 (2007).
DOI
|
14 |
M. A. Fiddy, B. J. Brames, and J. C. Dainty, “Enforcing irreducibility for phase retrieval in two dimensions,” Opt. Lett. 8, 96-98 (1983).
DOI
|
15 |
J. R. Fienup, “Reconstruction of objects having latent reference points,” J. Opt. Soc. Am. 73, 1421-1420 (1983).
DOI
|