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http://dx.doi.org/10.3807/JOSK.2015.19.1.063

Fabrication of Large Area Photonic Crystals with Periodic Defects by One-Step Holographic Lithography  

Ma, Jie (Key Laboratory of Optoelectronic Information and Sensing Technologies of Guangdong Higher Education Institutes, Jinan University)
Wong, Kam Sing (Department of Physics, Hong Kong University of Science & Technology)
Li, Shan (Key Laboratory of Optoelectronic Information and Sensing Technologies of Guangdong Higher Education Institutes, Jinan University)
Chen, Zhe (Key Laboratory of Optoelectronic Information and Sensing Technologies of Guangdong Higher Education Institutes, Jinan University)
Zhou, Jianying (State Key Laboratory of Optoelectronic Materials and Technologies, Sun Yat-sen University)
Zhong, Yongchun (Department of Physics, Hong Kong University of Science & Technology)
Publication Information
Journal of the Optical Society of Korea / v.19, no.1, 2015 , pp. 63-68 More about this Journal
Abstract
A one-step fabrication of a photonic crystal (PC) with functional defects is demonstrated. Using multi-beam phase-controlled holographic lithography with a diffracting optical element, large area one dimensional (1D) and two dimensional (2D) PCs with periodic defects were fabricated. The uniform area is up to $2mm^2$, and tens of defect channels have been introduced in the 1D and 2D PC structure. This technique gives rise to substantial reduction in the fabrication complexity and significant improvement in the spatial accuracy of introducing functional defects in photonic crystals. This method can also be used to design and fabricate three dimensional (3D) PCs with periodic defects.
Keywords
Defects; Photonic crystals; Holographic lithography; Liquid crystal-spatial light modulators;
Citations & Related Records
Times Cited By KSCI : 2  (Citation Analysis)
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