Browse > Article
http://dx.doi.org/10.3807/JOSK.2012.16.2.127

Forming a Fresnel Zone Lens: Effects of Photoresist on Digital-micromirror-device Maskless Lithography with Grayscale Exposure  

Huang, Yi-Hsiang (Department of Mechanical Engineering, National Taiwan University of Science and Technology)
Jeng, Jeng-Ywan (Department of Mechanical Engineering, National Taiwan University of Science and Technology)
Publication Information
Journal of the Optical Society of Korea / v.16, no.2, 2012 , pp. 127-132 More about this Journal
Abstract
This study discusses photoresist forming using a composite grayscale to fabricate a Fresnel lens. Grayscale lithography is a common production method used to facilitate the forming of lenses with different curvatures and depths. However, this approach is time consuming and expensive. This study proposes a method for overcoming these obstacles by integrating a digital micromirror device and microscope to supplant the traditional physical grayscale mask. This approach provides a simple and practical maskless optical lithography system. According to the results, the two adjacent grayscales displayed substantial differences between the high grayscale and influence the low grayscale that ultimately affected photoresist formation. Furthermore, we show that change of up to 150% in the slope can be achieved by changing the grayscale gradient in the central zone and the ring profile. The results of the optical experiment show a focus change with different gray gradients.
Keywords
Grayscale lithography; Digital micromirror device; Fresnel zone lens;
Citations & Related Records
Times Cited By KSCI : 5  (Citation Analysis)
Times Cited By Web Of Science : 1  (Related Records In Web of Science)
연도 인용수 순위
1 W. Daschner, R. Stein, P. Long, C. Wu, and S. H. Lee, "One-step lithography for mass production of multilevel diffractive optical elements using high-energy beam sensitive (HEBS) gray-level mask," Proc. SPIE 2689, 153-155 (1996).
2 T.-S. Oh, S.-W. Jin, S.-K. Choi, Y.-C. Kim, D.-W. Kim, S.-J. Ahn, Y.-B. Lee, and H.-S. Kim, "Experimental study on the operation of a keyhole-shaped lens in a micro-column," J. Opt. Soc. Korea 15, 368-372 (2011).   DOI   ScienceOn
3 K.-U. Choi, S.-H. Song, and S.-G. Kim, "Lens design of the eyepiece combined with the accommodation-dependent navarro eye at an on-axis point," J. Opt. Soc. Korea 15, 55-62 (2011).
4 C.-S. Rim, "The optical design of miniaturized microscope objective for CARS imaging catheter with fiber bundle," J. Opt. Soc. Korea 14, 424-430 (2010).   DOI   ScienceOn
5 Y.-D. Kim, M.-K. Ahn, and D.-G. Gweon, "Design and fabrication of a multi-modal confocal endo-microscope for biomedical imaging," J. Opt. Soc. Korea 15, 300-304 (2011).   DOI   ScienceOn
6 K. Totsu and M. Esashi, "Gray-scale photolithography using maskless exposure system," J. Vac. Sci. Technol. B 23, 1487-1490 (2005).
7 X. Guo, J. Du, Y. Guo, C. Du, Z. Cui, and J. Yao, "Simulation of DOE fabrication using DMD-based gray-tone lithography," Microelectron. Eng. 83, 1012-1016 (2006).   DOI   ScienceOn
8 N. Luo, Y. Gao, S. He, and Y. Rao, "Research on exposure model for DMD-based digital gray-tone mask," Proc. SPIE 7657, 765712-1-765712-6 (2010).
9 D. W. Monk, "The digital micromirror device for projection display," Microelectronic Eng. 27, 489-493 (1995).   DOI   ScienceOn
10 Y. Sato, K. Mizutani, N. Wakatsuki, and T. Nakamura, "Design for an aspherical acoustic Fresnel lens with phase continuity," Jpn. J. Appl. Phys. 47, 4354-4359 (2008).   DOI
11 J. Alda, J. M. Rico-Garcia, J. M. Lopez-Alonso, B. Lail, and G. Boreman, "Design of Fresnel lenses and binary-staircase kinoforms of low value of the aperture number," Opt. Comm. 260, 454-461 (2006).   DOI   ScienceOn
12 L.-G. Niu, D. Wang, T. Jiang, S.-Z. Wu, A.-W. Li, and J.-F. Song, "High fill-factor multilevel Fresnel zone plate arrays by femtosecond laser direct writing," Opt. Comm. 284, 777-781 (2011).   DOI   ScienceOn
13 C.-R. Lee, K.-C. Lo, and T.-S. Mo, "Electrically switchable Fresnel lens based on a liquid crystal film with a polymer relief patter," Jpn. J. Appl. Phys. 46, 4144-4147 (2007).   DOI
14 C.-C. Chen, M.-H. Li, C.-Y. Chang, J.-K. Sheu, G.-C. Chi, W.-T. Cheng, J.-H. Yeh, J.-Y. Chang, and T. Ito, "GaN diffractive microlenses fabricated with gray-level mask," Opt. Comm. 215, 75-78 (2003).   DOI   ScienceOn
15 C.-H. Hou, M.-H. Li, C.-C. Chen, J.-Y. Chang, J.-K. Sheu, G.-C. Chi, C. Wu, W.-T. Cheng, and J.-H. Yeh, "Gallium nitride diffractive microlenses using in ultraviolet micro-optics system," Opt. Rev. 10, 287-289 (2003).   DOI
16 K. Reimer, W. Henke, H. J. Quenzer, W. Pilz, and B. Wagner, "One-level gray-tone design-mask data preparation and pattern transfer," Microelectron. Eng. 30, 559-562 (1996).   DOI   ScienceOn
17 J. Guo, H. Ohmori, Y. Uehara, S. Morita, and K. Katahira, "Diamond cutting of a large off-axis Fresnel lens mold," J. Vac. Sci. Technol. B 27, 1345-1350 (2009).   DOI   ScienceOn
18 K. Totsu, K. Fujishiro, S. Tanaka, and M. Esashi, "Fabrication of three-dimensional microstructure using maskless gray-scale lithography," Sens. Actuators A 130-131, 387-392 (2006).   DOI   ScienceOn
19 D.-H. Lee, "Optical system with 4 ${\mu}m$ resolution," J. Opt. Soc. Korea 14, 266-276 (2010).   DOI   ScienceOn
20 K. Mori, A. Miyazaki, H. Ogasawara, T. Nakamura, and Y. Takeuchi, "Numerical analysis of sound pressure fields focused by phase continuous Fresnel lens using finite difference time domain method," Jpn. J. Appl. Phys. 46, 4990-4997 (2007).   DOI
21 A. Gurtler, J. J. Gilijamse, A. A. R. Wetzels, L. D. Noordam, E. Sali, and M. Bellini, "Frequency selection of supercontinuum ultrashort pulses using a Fresnel zone plate," Opt. Comm. 270, 336-339 (2007).   DOI   ScienceOn
22 V. D. Rumyantsev, "Solar concentrator modules with silicone-on-glass Fresnel lens panels and multijunction cells," Opt. Express 18, A17-A24 (2010).   DOI
23 L. Zhao, W. Duan, and S. F. Yelin, "All-optical Fresnel lens in coherent media: controlling image with image," Opt. Express 19, 981-993 (2011).   DOI
24 M. Amiri and M. T. Tavassoly, "Fresnel diffraction from 1D and 2D phase steps in reflection and transmission modes," Opt. Comm. 272, 349-361 (2007).   DOI   ScienceOn