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http://dx.doi.org/10.3807/JOSK.2010.14.4.409

Surface Form Measurement Using Single Shot Off-axis Fizeau Interferometry  

Abdelsalam, Dahi Ghareab (Division of Mechanical System Engineering, Chonbuk National University)
Baek, Byung-Joon (Division of Mechanical System Engineering, Chonbuk National University)
Cho, Yong-Jai (Division of Advanced Technology, Korea Research Institute of Standards and Science)
Kim, Dae-Suk (Division of Mechanical System Engineering, Chonbuk National University)
Publication Information
Journal of the Optical Society of Korea / v.14, no.4, 2010 , pp. 409-414 More about this Journal
Abstract
This paper describes the surface form measurement of a spherical smooth surface by using single shot off-axis Fizeau interferometry. The demodulated phase map is obtained and unwrapped to remove the $2\pi$ ambiguity. The unwrapped phase map is converted to height and the 3D surface height of the surface object is reconstructed. The results extracted from the single shot off-axis geometry are compared with the results extracted from four-frame phase shifting in-line interferometry, and the results are in excellent agreement.
Keywords
Fizeau interferometer; Phase shifting; Off-axis geometry; Numerical reconstruction;
Citations & Related Records
Times Cited By KSCI : 1  (Citation Analysis)
Times Cited By Web Of Science : 9  (Related Records In Web of Science)
Times Cited By SCOPUS : 9
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