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http://dx.doi.org/10.3807/JOSK.2010.14.2.131

Noise-robust Phase Gradient Retrieval Formulation for Phase-shifting Interferometry  

Park, Dae-Seo (SEM Co. - Inha University, Precision Inspection and Measurement Center (PIMC))
O, Beom-Hoan (SEM Co. - Inha University, Precision Inspection and Measurement Center (PIMC))
Park, Se-Geun (Optics and Photonics Elite Research Academy (OPERA), Inha University)
Lee, El-Hang (Optics and Photonics Elite Research Academy (OPERA), Inha University)
Park, Jae-Hyun (SEM Co. - Inha University, Precision Inspection and Measurement Center (PIMC))
Lee, Seung-Gol (SEM Co. - Inha University, Precision Inspection and Measurement Center (PIMC))
Publication Information
Journal of the Optical Society of Korea / v.14, no.2, 2010 , pp. 131-136 More about this Journal
Abstract
Modification of the phase gradient formulation is proposed in order to make phase retrieval less susceptible to noise. The modified formulation is derived from separation of the phase terms and the intensity modulation terms of interferograms, and subsequent differentiation to reduce the noise-induced error of the phase gradient vector. Its performance is evaluated and compared to that of the conventional formulation, and noise-robust nature is confirmed.
Keywords
Phase-shifting interferometry; Phase retrieval technique; Phase gradient vector;
Citations & Related Records
Times Cited By KSCI : 3  (Citation Analysis)
Times Cited By Web Of Science : 1  (Related Records In Web of Science)
Times Cited By SCOPUS : 1
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