Fabrication of Nano Dot and Line Arrays Using NSOM Lithography |
Kwon Sangjin
(Department of Mechatronics, Gwangju Institute of Science and Technology)
Kim Pilgyu (Department of Mechatronics, Gwangju Institute of Science and Technology) Jeong Sungho (Department of Mechatronics, Gwangju Institute of Science and Technology) Chang Wonseok (Nanoprocessing Group, Korea Institute of Machinery and Materials) Chun Chaemin (Department of Materials Science and Engineering, Gwangju Institute of Science and Technology) Kim Dong-Yu (Department of Materials Science and Engineering, Gwangju Institute of Science and Technology) |
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