Direct Patterning of Self Assembled Nano-Structures of Block Copolymers via Electron Beam Lithography
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Yoon Bo Kyung
(Department of Materials Science and Engineering, Yonsei University)
Hwang Wonseok (Department of Materials Science and Engineering, Yonsei University) Park Youn Jung (Department of Materials Science and Engineering, Yonsei University) Hwang Jiyoung (Department of Materials Science and Engineering, Yonsei University) Park Cheolmin (Department of Materials Science and Engineering, Yonsei University) Chang Joonyeon (Nano Device Research Center, Korea Institute of Science and Technology) |
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