The Effect of Magnetic Field Direction on the Imaging Quality of Scanning Electron Microscope |
Ai, Libo
(State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China)
Bao, Shengxiang (State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China) Hu, Yongda (State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China) Wang, Xueke (State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China) Luo, Chuan (State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China) |
1 | L. Chen and J. Liu, Meas. Sci. Technol. 26, 075402 (2015). DOI |
2 | G. Shi, S. Bao, W.Lai, Z. Rao, X. Zang, and Z. Wang, SCANNING. 35, 69 (2013). DOI |
3 | G. H. Bernstein, A. D. Carter, and D. C. Joy, SCANNING. 35, 1 (2013). DOI |
4 | Y. U. Ko and M. S. Chung, SCANNING. 8, 549 (1998). |
5 | M. Pluska, A. Czerwinski, J. Ratajczak, J. Katcki, and R. Rak, J MICROSC. 224, 89 (2006). DOI |
6 | M. Pluska, A. Czerwinski, J. Ratajczak, J. Katcki, L. Oskwarek, and R. Rak, Micron. 40, 46 (2009). DOI |
7 | H. Fujioka, K. Nakamae, H. Takaoka, and K. Ura, Trans. IECE Japan. E64, 295 (1981). |
8 | W. Wan, H. Lu, V. Zhukova, M. Ipatov, A. Zhukov, and Y. Shen, AIP ADV. 6, 095309 (2016). DOI |
9 | C. W. Oatley, The Scanning Electron Microscope, Cambridge University Press, London (1972) pp. 84-90. |
10 | G. Pfefferkorn, Scanning Electron Microscopy, SEM Inc, AMF O' Hare (1978) pp. 102-105. |
11 | T. Agemura, S. Fukuhara, and H. Todokoro, SCANNING. 23, 403 (2001). |
12 | M. Balasubramanyam and E. Munro, Proc. SPIE. 2252, 270 (1995). |
13 | H. Seiler, J. Appl. Phys, 54, R1 (1983). DOI |
![]() |