1 |
A. M. Rankers, Ph.D. dissertation, Univ. Twente, Enschede, The Netherlands, 67 (1997).
|
2 |
CANON, US patents, US20050217956 (2005).
|
3 |
Nikon, US patents, US20050248744 (2005).
|
4 |
Hirokazu Yoshioka and Nobuyoshi Murai, Proceedings of the 7th International Workshop on Accelerator Alignment, SPring-8 (2002).
|
5 |
Yi-De Chen, Chyun-Chau Fuh, and Pi-Cheng Tung, IEEE Trans. Magn. 41, 1149 (2005).
DOI
|
6 |
Rahul Banik and Dae-gab Gweon, Sensors and Actuators A 137, 236 (2007).
DOI
|
7 |
Y. Nakamura, M. Nakayama, M. Yasuda and T. Fujita, Smart Materials and Structures, 15, 1133 (2006).
DOI
|
8 |
Shinji Wakui, Precision Engineering, 27, 170 (2003).
DOI
|
9 |
K. Mori, T. Munemoto, H. Otsuki, Y. Yamaguchi, and K. Akagi, IEEE Trans. Magn. 27, 5298 (1991).
DOI
|
10 |
Chien-Sheng Liu, Psang-Dain Lin, Po-Heng Lin, Shun- Sheng Ke, Yu-Hsiu Chang, and Ji-Bin Horng, IEEE Trans. Magn. 45, 155 (2009).
DOI
|
11 |
Young-Man Choi and Dae-Gab Gweon, IEEE/ASME Trans. Mech. 16, 925 (2011).
DOI
|
12 |
Q. Y. Wu, Qiang Wang, Qi Peng, Ge Ren, and C. Y. Fu, Opto-Electronic Engineering 31, 15 (2004).
|
13 |
D. C. Hanselman, McGraw-Hill, Inc. (1994).
|
14 |
Liu, Yu, Ming Zhang, Yu Zhu, Jin Yang, and Badong Chen, IEEE Trans. Magn. 47, 2247 (2011).
DOI
|
15 |
M. G. Lee and D.-G. Gweon, J. Magn. Magn. Mater. 218, 336 (2004).
|