Efficient Approach to Measure Crystallization Temperature in Amorphous Thin Film by Infrared Reflectivity |
Wang, Wenxiu
(Department of Electronic Engineering, Graduate School of Engineering, Tohoku University)
Saito, Shin (Department of Electronic Engineering, Graduate School of Engineering, Tohoku University) Yakabe, Hidetaka (Metallurgical Research Laboratory, Hitachi Metals, Ltd.) Takahashi, Migaku (New Industry Creation Hatchery Center, Tohoku University) |
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