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Friction Mechanisms of Silicon Wafer and Silicon Wafer Coated with Diamond-like Carbon Film and Two Monolayers  

Singh R. Arvind (Tribology Research Center, Korea institute of Science and Technology)
Yoon Eui-Sung (Tribology Research Center, Korea institute of Science and Technology)
Han Hung-Gu (Tribology Research Center, Korea institute of Science and Technology)
Kong Ho-Sung (Tribology Research Center, Korea institute of Science and Technology)
Publication Information
Journal of Mechanical Science and Technology / v.20, no.6, 2006 , pp. 738-747 More about this Journal
Abstract
The friction behaviour of Si-wafer, diamond-like carbon (DLC) and two self-assembled monolayers (SAMs) namely dimethyldichlorosilane (DMDC) and diphenyl-dichlorosilane (DPDC) coated on Si-wafer was studied under loading conditions in milli-newton (mN) range. Experiments were performed using a ball-on-flat type reciprocating micro-tribo tester. Glass balls with various radii 0.25 mm, 0.5 mm and 1 mm were used. The applied normal load was in the range of 1.5 mN to 4.8 mN. Results showed that the friction increased with the applied normal load in the case of all the test materials. It was also observed that friction was affected by the ball size. Friction increased with the increase in the ball size in the case of Si-wafer. The SAMs also showed a similar trend, but had lower values of friction than those of Si-wafer In-terestingly, for DLC it was observed that friction decreased with the increase in the ball size. This distinct difference in the behavior of friction in DLC was attributed to the difference in the operating mechanism. It was observed that Si-wafer and DLC exhibited wear, whereas wear was absent in the SAMs. Observations showed that solid-solid adhesion was dominant in Si-wafer, while plowing in DLC. The wear in these two materials significantly Influenced their friction. In the case of SAMs their friction behaviour was largely influenced by the nature of their molecular chains.
Keywords
Friction; Wear; Tribology; DLC; SAM;
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1 Singh, A. R., Yoon, E. -S., Han, H. -G. and Kong, H., 2005, 'Friction Characteristics of Selfassembled Monolayers Coated on Si-Wafer by Chemical Vapor Deposition at Nano/Micro-Scale,' WTC2005-63417, Micro- and Nanotribology, 3rd World Tribology Congress, Washington D.C, USA, September 2005
2 Sundararajan, S. and Bhushan, B., 1999, 'Micro/ Nanotribology of Ultra-Hard Amorphous Carbon coatings Using Atomic Force/Friction Force Microscopy,' Wear, Vol. 225, pp.678-689   DOI   ScienceOn
3 Sundararajan, S. and Bhushan, B., 2001, 'Development of a Continuous Microscratch Technique in an Atomic Force Microscope and Its Application to Study Scratch Resistance of Ultrathin Hard Amorphous Carbon Coatings,' J. Mater. Res, Vol. 16, No.2, pp.437-445   DOI   ScienceOn
4 Oh, H. -J., Yoon, E. -S., Han, H. -G. and Kong, H., 2004, 'Micro/nano Adhesion and Friction Properties of SAMs with Different Head and Functional Group According to the Coating Methods,' KSTLE Spring Conference 2004, pp. 177- 184
5 Scherge, M. and Gorb, S. N., 2001, 'Biological Micro- and Nanotribology,' Springer- Verlag, Berlin Heidelberg, pp. 7 -76
6 Matweb-Online Material Data Sheet http:// www.Matweb.com
7 Liu, H., Ahmed, S. I. -U. and Scherge, M., 2001, 'Microtribological Properties of Silicon and Silicon Coated with Diamond Like Carbon, Octadecyltrichlorosilane and Steric Acid Cadmium Salt Films: A Comparative Study,' Thin Solid Films, Vol. 381, pp. 135-142   DOI   ScienceOn
8 Maboudian, R. and Carraro, C., 2004, 'Surface Chemistry and Tribology of MEMS,' Annu. Rev. Phys. Chem, Vol. 55, pp. 35-54   DOI   ScienceOn
9 Maboudian, R. and Howe, R. T., 1997, 'Critical Review: Adhesion in Surface Micromechanical Structure,' J. Vac. Sci. Technol, Vol. B 15, No. 1, pp. 1-20   DOI   ScienceOn
10 Komvopoulos, K., 2000, 'Head-disk Interface Contact Mechanics for Ultrahigh Density Magnetic Recording,' Wear, Vol. 238, pp. 1-11   DOI   ScienceOn
11 Lee, K. -R., Eun, K. Y. and Rhee, J. S., 1995, 'Structure and Mechanical Properties of Nitrogen Incorporated Diamond-Like Carbon Films,' Mater. Res. Soc. Symp. Proc., 356, pp. 233-238
12 Bhushan, B., 2001a, 'Tribology on the Macroscale to Nanoscale of Micro-electromechanical System Materials,' Proc. Instn. Engrs, ImechE Part J, Vol. 215, pp. 1-18
13 Grischke, M., Hieke, A., Morgenweck, F. and Dimigen, H., 1998, 'Variation of the Wettability of DLC-Coatings by Network Modification,' Diamond Related Materials, Vol. 7, pp. 454-458   DOI   ScienceOn
14 Henck, Steven A., 1997, 'Lubrication of Digital Micromirror Devices,' Tribology Letters, Vol. 3, pp.239-247   DOI
15 Johnson, K. L., Kendall, K. and Roberts, A. D., 1971, 'Surface Energy and Contact of Elastic Solid,' Proceedings of the Royal Society of London A, Vol. 324, pp. 301-313   DOI
16 Gardos, M. N., 1996, 'Surface Chemistry-controlled Tribological Behaviour of Si and Diamond,' Tribology Letters, Vol. 2, p. 173   DOI
17 Bhushan, B., 1999, 'Nanoscale Tribophysics and Tribomechanics,' Wear, Vol. 225, pp. 465-492   DOI   ScienceOn
18 Bhushan, B., 2001b, Modern Tribology Handbook, Vol. 2, CRC Press, Boca Raton, pp. 909-929
19 Bowden, F. P. and Tabor, D., 1950, 'The Friction and Lubrication of Solids,' Clarendon Press, Oxford, pp.90-121
20 Eun, K. Y., Lee, K. -R., Yoon, E. -S. and Kong, H., 1996, 'Effect of Polymeric Debris on the Tribological Behavior of Diamond- Like Carbon Films,' Surface and Coatings Technology, Vol. 86-87, pp. 569-574   DOI   ScienceOn
21 URL: http://www.eetimes.com/story/OEG20010402S0092 'Ohio team studies friction shortfalls of MEMS'
22 Bhushan, B. and Liu, H., 2001c, 'Nanotribological Properties and Mechanisms of Alkylthiol and Biphenyl Thiol Self-assembled Monolayers Studied by AFM,' Physical Review B, Vol. 63, p.245-412   DOI   ScienceOn
23 Ahmed, S. I., Scherge, M., Li, X. and Schaefer, J. A., 1999, 'Microtribological Properties of Self Assembled Monolayers,' Proceedings of the GfT-Tribologie-Fachtangung 'Reibung, Schmierung und Verschleiss,' Gottingen, Germany, pp. 1-8
24 Ando, Y. and Ino, J., 1997, 'The Effect of Asperity Array Geometry on Friction and Pull-off Force,' J. Tribol, Vol. 119, pp.781-787   DOI   ScienceOn
25 Yoon, E. -S., Kong, H. and Lee, K. -R., 1998, 'Tribological Behaviour of Sliding Diamond-like Carbon Films Under Various Environments,' Wear, Vol. 217, pp. 262-270   DOI
26 Yoon, E. -S., Yang, S. H., Han, H. -G. and Kong, H., 2003, 'An Experimental Study on the Adhesion at a Nano-contact,' Wear, Vol. 254, pp.974-980   DOI   ScienceOn
27 Tupper, K. J. D. and Brenner, W., 1994, 'Molecular Dynamics Simulations of Friction in Self-assembled Monolayers,' Thin Solid Films, Vol. 253, pp. 185-189   DOI   ScienceOn