Browse > Article

On the Design of the Latch Mechanism for Wafer Containers in a SMIF Environment  

Lee, Jyh-Jone (Department of Mechanical Engineering, National Taiwan University)
Chen, Dar-Zen (Department of Mechanical Engineering, National Taiwan University)
Pai, Wei-Ming (Department of Mechanical Engineering, National Taiwan University)
Wu, Tzong-Ming (Industrial Technology Research Institute, Hsinchu)
Publication Information
Journal of Mechanical Science and Technology / v.20, no.12, 2006 , pp. 2025-2033 More about this Journal
Abstract
This paper presents, the design of a latch mechanism for wafer containers in a standard mechanical interface environment. For an integrated circuits fabrication factory, the standard mechanical interfaced wafer container is an effective tool to prevent wafers from particle contamination during wafer storage, transporting or transferring. The latch mechanism inside the container door is used to latch and further seal the wafer container for safety and air quality. Kinematic characteristics of the mechanism are established by analyzing the required functions of the mechanisms. Based on these characteristics, a methodology for enumerating feasible latch mechanisms is developed. New mechanisms with one degree-of-freedom and up to five links are generated. An optimum design is also identified with respect to the criteria pertinent to the application. The computer-aided simulation is also built to verify the design.
Keywords
Latch Mechanism; SMIF Environment; Kinematic Characteristics;
Citations & Related Records

Times Cited By Web Of Science : 0  (Related Records In Web of Science)
Times Cited By SCOPUS : 0
연도 인용수 순위
  • Reference
1 Parikh, M. and Kaempf, D., 1984, 'SMIF: A Technology for Wafer Cassette Transfer in VLSI Manufacturing,' Solid State Technology, Vol. 27, No.7, pp. 111-115
2 Tsai, L. W., 2000, Mechanism Design: Enumeration of Kinematic Structure According to ？Function, CRC Press, New York
3 Woo, L. S., 1967, 'Type Synthesis of Plane Linkages,' ASME Journal of Engineering for Industry, Vol. 89, pp. 159-172   DOI
4 Yan, H. S., 1992, 'A Methodology for Creative Mechanism Design,' Mechanism and Machine Theory, Vol. 27, No.3, pp. 235-242   DOI   ScienceOn
5 Hosoi, M., 1998, 'Shipping Container,' United States Patent, No. 5,988,392
6 Maney, G. A., O'Sullivan, A. W. and Faraco, W. G., 1987, 'Sealed Standard Interface Apparatus,' United States Patent, No. 4,674,939
7 Mayourian, M. and Freudenstein, F., 1984, 'Development of an Atlas of The Kinematic Structures of Mechanisms,' ASME Journal of Mechanisms, Transmissions, and Automation in Design, Vol. 106, pp. 458-461   DOI   ScienceOn
8 Mikkelsen, K. J., Adams, M. S., Bores, G. and Wiseman, B. S., 1999, 'Wafer Enclosure with Door,' United States Patent, No. 5,957,292
9 Muka, R. S., 1997, 'Door Drive Mechanisms for Substrate Carrier and Load Lock,' United States Patent, No. 5,609,459
10 Muka, R. S., 1998, 'Vacuum Integrated SMIF System,' United States Patent, No. 5,752,796
11 Muka, R. S., Pippins, M. W. and Drew, M. A., 1997a, 'Batchloader for Substrate Carrier on Load Lock,' United States Patent, No. 5,607,276
12 Muka, R. S., Pippins, M. W. and Drew, M. A., 1997b, 'Cluster Tool Batchloader of Substrate Carrier,' United States Patent, No. 5,613,821
13 Murata, M., Tanaka, T. and Morita, T., 1998, 'Sealable Container,' United States Patent, No. 5,743,424
14 Nyseth, D. L., 1998, 'Wafer Carrier with Door,' United States Patent, No. 5,711,427
15 Fan, H. K., Lee, J. J. and Huang, G. J., 1999, 'Latch Mechanism for Wafer Container,' United States Patent, No. 5,931,512
16 Dobrjanskyj, L. and Freudenstein, F., 1967, 'Some Applications of Graph Theory to The Structural Analysis of Mechanisms,' ASME Journal of Engineering for Industry, Vol. 89, pp. 153-158   DOI
17 Doche, C., 1990, 'Wafer Confinement for Control of Contamination in Microelectronics,' Solid State Technology, Vol. 33, No.8, pp. Sl-S5   DOI
18 Erdman, A. G. and Bowen, J., 1981, 'Type and Dimensional Synthesis of Casement Window Mechanism,' Mechanical Engineering, Vol. 103, pp.46-55
19 Freudenstein, F. and Maki, E. R., 1979, 'The Creation of Mechanisms According to Kinematic Structure and Function,' Journal of Environment and Planning, Vol. 6, pp. 375-391   DOI
20 Freudenstein, F. and Maki, E. R., 1983, 'Development of an Optimum Variable-Stroke Internal-Combustion Engine Mechanism from The Viewpoint of Kinematic Structure,' ASME Journal of Mechanisms, Transmissions, and Automation in Design, Vol. 105, No.2, pp. 259-267   DOI   ScienceOn
21 Freudenstein, F. and Maki, E. R., 1984, 'Kinematic Structure of Mechanisms for Fixed and Variable-Stroke Axial-Piston Reciprocating Machines,' ASME Journal of Mechanisms, Transmissions, and Automation in Design, Vol. 106, pp. 355 - 364   DOI   ScienceOn
22 Bonora, A. C. and Oen, J. T., 1996, 'Direct Loadlock Interface,' United States Patent, No.5, 586,585
23 Book of SEMI standards, SEMI E62-0999
24 Bonora, A. C. and Rosenquist, F. T., 1991, 'Sealable Transportable Container Having Improved Latch Mechanism,' United States Patent, No. 4,995,430
25 Bonora, A. C., Rosenquist, F. T. and Jain, S., Davis, M. R., 1998, 'Sealable, Transportable Container Having a Breather Assembly,' United States Patent, No. 5,740,845
26 Book of SEMI standards, SEMI E19-0697
27 Buchsbaum, F. and Freudenstein, F., 1970, 'Synthesis of Kinematic Structure of Geared Kinematic Chains and Other Mechanisms,' Mechanism and Machine Theory, Vol. 5, pp. 357-392
28 Datseris, P. and Palm, W., 1985, 'Principles on the Development of Mechanical Hands Which Can Manipulate Objects by Means of Active Control,' ASME Journal of Mechanisms, Transmissions, and Automation in Design, Vol. 107, No.2, pp. 148-156   DOI   ScienceOn