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Design, Fabrication, and Testing of a MEMS Microturbine  

Jeon Byung Sun (Hyundai Motor Company)
Park Kun Joong (School of Mechanical and Aerospace Engineering, Seoul National University)
Song Seung Jin (School of Mechanical and Aerospace Engineering, Seoul National University)
Joo Young Chang (School of Materials Science and Engineering, Seoul National University)
Min Kyoung Doug (School of Mechanical and Aerospace Engineering, Seoul National University)
Publication Information
Journal of Mechanical Science and Technology / v.19, no.2, 2005 , pp. 682-691 More about this Journal
Abstract
This paper describes the design, fabrication, and testing of a microturbine developed at Seoul National University. Here, the term 'microturbine' refers to a radial turbine with a diameter on the order of a centimeter. Such devices can be used to transmit power for various systems. The turbine is designed using a commercial CFD code, and it has a design flow coefficient of 0.238 and work coefficient of 0.542. It has 31 stator blades and 24 rotor blades. A hydrodynamic journal bearing and hydrostatic thrust bearings counteract radial and axial forces on the rotor. The test turbine consists of a stack of five wafers and is fabricated by MEMS technology, using photolithography, DRIE, and bonding processes. The first, second, fourth, and fifth layers contain plumbing, and hydrostatic axial thrust bearings for the turbine. The third wafer contains the turbine's stator, rotor, and hydrodynamic journal bearings. Furthermore, a turbine test facility containing a flow control system and instrumentation has been designed and constructed. In performance tests, a maximum rotation speed of 11,400 rpm and flow rate of 16,000 sccm have been achieved.
Keywords
Microturbine; Micro Power System; High Aspect Ratio; DRIE; Si Direct Bonding;
Citations & Related Records
Times Cited By KSCI : 1  (Citation Analysis)
Times Cited By Web Of Science : 1  (Related Records In Web of Science)
Times Cited By SCOPUS : 4
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