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Study on Residual Stress in Viscoelastic Thin Film Using Curvature Measurement Method  

Im, Young-Tae (Department of Mechanical Engineering, ME3053, KAIST, Science Town)
Park, Seung-Tae (Department of Mechanical Engineering, ME3053, KAIST, Science Town)
Park, Tae-Sang (Department of Mechanical Engineering, ME3053, KAIST, Science Town)
Kim, Jae-Hyun (Micro System ＆ Structural Mechanics Group, KIMM)
Publication Information
Journal of Mechanical Science and Technology / v.18, no.1, 2004 , pp. 12-19 More about this Journal
Abstract
Using LSM (laser scanning method) , the radius of curvature due to thermal deformation in polyimide film coated on Si substrate is measured. Since the polyimide film shows viscoelastic behavior, i.e., the modulus and deformation of the film vary with time and temperature, we estimate the relaxation modulus and the residual stresses of the polyimide film by measuring the radius of curvature and subsequently by performing viscoelastic analysis. The residual stresses relax by an amount of 10％ at 100$^{\circ}C$ and 20% at 150$^{\circ}C$ for two hours.
Keywords
Residual Stress; Curvature; Viscoelastic; Elastic-Viscoelastic Correspondence Principle; CTE Mismatch;
Citations & Related Records
Times Cited By KSCI : 1  (Citation Analysis)
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1 Christensen, R. M., 1982, 'Theory of Viscoelasticity,' Academic Press
2 Courjon, D. et al., 1995, 'New Optical Near Field Developments : Some Perspectives in Interferometry,' Ultramicroscopy, Vol. 61, pp. 117-125   DOI   ScienceOn
3 Findley, W. N. et al., 1976, ' Creep and Relaxation of Nonlinear Viscoelastic Materials with an Introduction to Linear Viscoelasticity,' North Holland Publishing Company
4 Stoney, G. G., 1909, 'The Tension of Metallic Films Deposited by Electrolysis,' Proc. Royal Soc., Vol. A82, pp. 172-175
5 Flinn, P. A. et al., 1987, 'Measurement and Interpretation of Stress in Aluminum-Based Metallization as a Function of Thermal History,' IEEE Trans. on Electronic Devices, Vol. ED-34, No. 3, pp. 689-699
6 Hecht, E., 1998, Optics, Addison-Wesley
7 Hwang, H. Y. et al., '2003, 'Thermo-Viscoelastic Residual Stress Analysis of Metal Liner-Inserted Composite Cylinder,' KSME International Journal, Vol. 17, pp. 171-180   과학기술학회마을
8 Kampfe, B., 2000, 'Investigation of Residual Stresses in Microsystems Using X-ray Diffraction,' Material Science and Engineering, Vol. A288, pp. 119-125   DOI   ScienceOn
9 Laserna, J. J., 1996, 'Mordern Techniques in Raman Spectroscopy,' John Wiley & Sons
10 Nix, W. D., 1989, 'Mechanical Properties of Thin Films,' Metal. Trans. A, Vol. 20A, pp. 2217-2245
11 Suwito, W. et al., 1999, 'Elastic Moduli, Strenght, and Fracture Initiation at Sharp Notches in Etched Single Crystal Silicon Microstructures,' J. Appl. Phys., Vol. 85, pp. 3519-3534   DOI   ScienceOn
12 Witvrouw, A. et al., 1993, 'Determination of the plane Stress Elastic Constants of Thin Films from Substrate Curvature Measurements: Applications to Amorphous Metals,' J. Appl. Phys., Vol. 73, pp. 7344-7350   DOI   ScienceOn
13 Timoshenko, S., 1925, 'Analysis of Bimaterial Themostats,' J. Opt. Soc. Am., Vol. 11, pp. 233-256   DOI
14 Ward, I. M. et al., 1993, 'An Introduction to the Mechanical Properties of Solid Polymers,' John Wiley & Sons
15 Lim, J.H. et al., 2000, 'A Thermomechanical Analysis of MCM-D Substrate of Polymer and Metal Multilayer,' Key Engineering Materials, Vol. 183-187, pp. 1123-1128   DOI