Browse > Article

Design and Construction of a Surface Encoder with Dual Sine-Grids  

Kimura, Akihide (Department of Nanomechanics, Tohoku University)
Gao, Wei (Department of Nanomechanics, Tohoku University)
Kiyono, Satoshi (Department of Nanomechanics, Tohoku University)
Publication Information
International Journal of Precision Engineering and Manufacturing / v.8, no.2, 2007 , pp. 20-25 More about this Journal
Abstract
This paper describes a second-generation dual sine-grid surface encoder for 2-D position measurements. The surface encoder consisted of a 2-D grid with a 2-D sinusoidal pattern on its surface, and a 2-D angle sensor that detected the 2-D profile of the surface grid The 2-D angle sensor design of previously developed first-generation surface encoders was based on geometric optics. To improve the resolution of the surface encoder, we fabricated a 2-D sine-grid with a pitch of $10{\mu}m$. We also established a new optical model for the second-generation surface encoder that utilizes diffraction and interference to generate its measured values. The 2-D sine-grid was fabricated on a workpiece by an ultra precision lathe with the assistance of a fast tool servo. We then performed a UV-casting process to imprint the sine-grid on a transparent plastic film and constructed an experimental setup to realize the second-generation surface encoder. We conducted tests that demonstrated the feasibility of the proposed surface encoder model.
Keywords
Surface encoder; Position detection; Measurement; Optical sensor; Nanometer;
Citations & Related Records

Times Cited By Web Of Science : 5  (Related Records In Web of Science)
연도 인용수 순위
  • Reference
1 Shamoto, E., Murase, H. and Moriwaki, T., 'Ultraprecision 6-axis table driven by the means of a walking drive,' Annals of the CIRP, Vol. 49, No. 1, pp. 299-302, 2000   DOI   ScienceOn
2 Kim, W. J. and Trumper, D. L., 'High precision magnetic levitation stage for photolithography,' Precision Engineering, Vol. 22, No. 2, pp. 66-77, 1998   DOI   ScienceOn
3 Kao, C. F., Lu, S. H. and Lu, M. H., 'High resolution planar encoder by retro-reflection,' Review of Scientific Instruments, Vol. 76, No. 085110, pp. 1-7, 2005
4 Gao, W., Dejima, S., Shimizu, Y. and Kiyono, S., 'Precision positioning of two-axis positions and tilt motions using a surface encoder,' Annals of CIRP, Vol. 52, No. 1, pp. 435-438, 2003   DOI   ScienceOn
5 Dejima, S., Gao, W., Shimizu, H. and Kiyono, S., 'Precision positioning of a five degree-of-freedom planar motion stage,' Mechatronics, Vol. 15, pp. 969-987, 2005   DOI   ScienceOn
6 Kim, S. and Kang, S., 'Replication qualities and optical properties of UV-moulded microlens arrays,' Journal of Physics D: Applied Physics, Vol. 36, pp. 2451-2456, 2003   DOI   ScienceOn
7 Gao, W., Huang, P. S., Yamada, T. and Kiyono, S., 'A compact and sensitive two-dimensional angle probe for flatness measurement of large silicon wafers,' Precision Engineering, Vol. 26, No. 4, pp. 396-404, 2002   DOI   ScienceOn
8 Schatten, M. L. and Smith, H. I., 'The critical role of metrology in nanotechnology,' Proceedings of the SPIE Workshop on Nanostructure Science, Metrology and Technology, Vol. 4608, pp. 1-9, 2001
9 Hocken, R. J., Trumper, D. L. and Wang, C., 'Dynamics and control of the UNCC/MIT sub-atomic measuring machine,' Annals of CIRP, Vol. 50, No. 1, pp. 373-376, 2001   DOI   ScienceOn
10 Teimel, A., 'Technology and applications of grating interferometers in high-precision measurement,' Precision Engineering, Vol. 14, No. 3, pp. 147-154, 1992   DOI   ScienceOn
11 Miller, M. H., Gattard, K. P., Dow, T. A. and Taylor, L. W., 'A controller architecture for integrating a fast tool servo into a diamond turning machine,' Precision Engineering, Vol. 16, No. 1, pp. 42-48, 1994   DOI   ScienceOn
12 Kiyono, S., Gao, W., Kanai, M., Hoshino, T. and Shimizu, Y., 'A new method of position detection using an optical scanning angle sensor,' JSME International Journal, Vol. 67, No. 3, pp. 493-497, 2001
13 Kang, S., 'Replication Technology for Micro/Nano Optical Components,' Japanese Journal of Applied Physics, Vol. 43, No. 8B, pp. 5706-5716, 2004   DOI
14 Gao, W., Dejima, S., Yanai, H., Katakura, K., Kiyono, S. and Tomita, Y., 'A surface motor-driven planer motion stage integrated with an $XY{\theta}z$ surface encoder for precision positioning,' Precision Engineering, Vol. 28, No. 3, pp. 329-337, 2004   DOI   ScienceOn
15 Kiyono, S., Cai, P. and Gao, W., 'An angle-based position detection method for precision machines,' JSME International Journal, Vol. 42, No. 1, pp. 44-48, 1999   DOI
16 Gao, W., Kiyono, S. and Satoh, E., 'Precision measurement of multi-degree-of-freedom spindle errors using two-dimensional slope sensors,' Annals of CIRP, Vol. 51, No. 1, pp. 447-450, 2002   DOI   ScienceOn
17 Gao, W., Araki, T., Kiyono, S., Okazaki, Y. and Yamanaka, M., 'Precision nano-fabrication and evaluation of a large area sinusoidal grid surface for a surface encoder,' Precision Engineering, Vol. 27, No. 3, pp. 289-298, 2003   DOI   ScienceOn
18 Fan, K. C. and Chen, M. J., 'A 6-degree-of-freedom measurement system for the accuracy of X-Y stages,' Precision Engineering, Vol. 24, pp. 15-23, 2000   DOI   ScienceOn
19 Dow, T. A., Miller, M. H. and Falter, P. J., 'Application of a fast tool servo for diamond turning of nonrotationally symmetric surfaces,' Precision Engineering, Vol. 13, No. 4, pp. 243-250, 1991   DOI   ScienceOn