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Design of a Cylindrical Flexure Jointed Stewart Platform for Aligning the Condenser in an X-ray Microscope  

Kang Sung-Hoon (Department of Mechanical Engineering, KAIST)
Kang Dong-Woo (Department of Mechanical Engineering, KAIST)
Gweon Dae-Gab (Department of Mechanical Engineering, KAIST)
Yoon Gwon-Ha (Department of Radiology, Wonkwang University School of Medicine)
Min Jin-Young (LISTEM Co, Ltd)
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Abstract
This paper proposes a new type of six degree-of-freedom fine positioner that can be used to align the condenser in X-ray microscopy precisely. The new concept was based on the requirements for an X-ray microscope. A proposed modeling method was used to obtain an optimal design, which was verified with a finite element analysis. The fine positioner was then constructed and an experiment was used to validate its performance.
Keywords
Optics alignment; Flexure; Stewart platform; X-ray microscope;
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