Browse > Article

Effect of Film Thickness on the Tribological Characteristics of Zdol Lubricant on Silicon Surface  

Kim, Yong-Sik (Department of Mechanical Engineering, Graduate School, Yonsei University)
Yang, Ji-Chul (Samsung Electronics, Yongin-City,)
Kim, Dae-Eun (School of Mechanical Engineering, Yonsei University)
Publication Information
International Journal of Precision Engineering and Manufacturing / v.5, no.1, 2004 , pp. 13-18 More about this Journal
Abstract
In precision mechanical components that experience sliding, it is important to reduce the friction to minimize surface damage. Particularly, new lubrication methods are needed to reduce friction in silicon based micro-systems applications. In this work, the tribological characteristics of PFPE (Perfluoropolyether) Zdol lubricant on silicon were investigated based on the thickness of the film. The lubricant was coated on silicon wafer specimens by the dip coating method. It was shown that the friction coefficient as well as stiction decreased as the thickness of the film increased. The results of this work may be applied to improve the tribological performance of silicon based micro-system components.
Keywords
Contact angle; Friction; Stiction; Surface energy; Zdol;
Citations & Related Records
Times Cited By KSCI : 1  (Citation Analysis)
연도 인용수 순위
1 Bhushan, B. ed., 'Tribology Issues and Opportunities in MEMS,' Kluwer Academic Publishers, Boston, 1998
2 Eapen, K. C., Patton, S. T. and Zabinski, J. S., 'Lubrication of Microelectromechanical Systems (MEMS) Using Bound and Mobile Phases of Fombline Zdol,' Tribol. Lett., Vol. 12, pp. 35 - 41, 2002   DOI   ScienceOn
3 Song, S. H. and Kwon, Y. K, 'Fatigue Crack Retardation and Retardation Mechanism in Variable Loading,' Int. J. of KSPE, Vol. 3, No.3, pp. 76 -77, 2002
4 Gao, C., Lee, Y. C., Chao, J. and Russak, M., 'Dipcoating of Ultra-thin Liquid Lubricant and Its Control for Thin-film Magnetic Hard Disks,' IEEE Trans. Magn., Vol. 31, pp. 2982 - 2984,1995   DOI   ScienceOn
5 Lee, E. S., 'Development of Ultra Clean Machining Technology with Electrolytic Polishing Process,' Int. J. of KSPE, Vol. 2, No.1, pp. 18 - 25, 2001
6 Zhao, Z., Bhushan, B. and Kajdas, C., 'Tribological Performance ofPFPE and X-IP Lubricants at Headdisk Interface. Part II. Mechanisms,' Tribol. Lett., Vol. 6,pp. 141 -148, 1999   DOI
7 Kim, N. Y., and Laibinis, P. E., 'Thermal Derivatization of Porous Silicon with Alcohols,' 1. of Am. Chern. Soc., Vol. 119, pp. 2297 - 2298, 1997   DOI   ScienceOn
8 R$\ddot{u}$he, J., Novotny, V., Clarke, T. and Street, G. B., 'Ultrathin Perfluoropolyether Films : Influence of Anchoring and Mobility of Polymers on the Tribological Properties,' J. of Tribol., Vol. 118, pp. 663 - 668, 1960