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http://dx.doi.org/10.5229/JECST.2013.4.4.163

Preparation of Tantalum Anodic Oxide Film in Citric Acid Solution - Evidence and Effects of Citrate Anion Incorporation  

Kim, Young-Ho (Physical Chemistry Laboratory, Division of Chemistry, Graduate School of Science, Hokkaido University)
Uosaki, Kohei (Physical Chemistry Laboratory, Division of Chemistry, Graduate School of Science, Hokkaido University)
Publication Information
Journal of Electrochemical Science and Technology / v.4, no.4, 2013 , pp. 163-170 More about this Journal
Abstract
Tantalum anodic oxide film was prepared in citric acid solution of various concentrations and the prepared Ta anodic oxide film was characterized by various electrochemical techniques and X-ray photoelectron spectroscopy (XPS). The prepared Ta anodic oxide film showed typical n-type semiconducting properties and the dielectric properties were strongly dependent on the citric acid concentration. The variation of electrochemical and electronic properties was explained in terms of electrolyte anion incorporation into the anodic oxide film, which was supported by XPS measurements.
Keywords
Tantalum oxide; Anodic oxide film; Dielectric material; XPS; Impedance;
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