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Comparison of Resonance Characteristics of ZnO-Based FBAR Devices for Various Thermal-Annealing Conditions  

Son, Hae-Il (School of Engineering, Information and Communication University)
Mai, Linh (School of Engineering, Information and Communication University)
Yoon, Giwan (School of Engineering, Information and Communication University)
Publication Information
Journal of information and communication convergence engineering / v.3, no.1, 2005 , pp. 23-27 More about this Journal
Abstract
In this paper, the effects of various annealing conditions on the resonance characteristics of ZnO-based FBAR devices are compared. Several FBAR device samples were fabricated by using three different annealing methods while one sample remained non-annealed as a reference for comparison. Return loss ($S_11$) could be significantly improved by both Bragg reflector-annealing and/or post-annealing. Especially, the use of the combined annealings resulted in most desirable resonance improvement compared with the Bragg reflector-annealing or post-annealing method alone.
Keywords
Film bulk acoustic resonator (FBAR); Bragg reflector; Thermal annealing; Return loss (; and Q-factor;
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