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http://dx.doi.org/10.5370/JEET.2015.10.3.1138

Effects of Fabrication Process Variation on Impedance of Neural Probe Microelectrodes  

Cho, Il Hwan (Dept. of Electronic Engineering, Myongji University)
Shin, Hyogeun (Dept. of Biomedical Engineering, University of Science and Technology (UST))
Lee, Hyunjoo Jenny (Center for BioMicrosystems, Korea Institute of Science and Technology (KIST))
Cho, Il-Joo (Center for BioMicrosystems, Korea Institute of Science and Technology (KIST))
Publication Information
Journal of Electrical Engineering and Technology / v.10, no.3, 2015 , pp. 1138-1143 More about this Journal
Abstract
Effects of fabrication process variations on impedance of microelectrodes integrated on a neural probe were examined through equivalent circuit modeling and SPICE simulation. Process variation and the corresponding range were estimated based on experimental data. The modeling results illustrate that the process variation induced by metal etching process was the dominant factor in impedance variation. We also demonstrate that the effect of process variation is frequency dependent. Another process variation that was examined in this work was the thickness variation induced by deposition process. The modeling results indicate that the effect of thickness variation on impedance is negligible. This work provides a means to predict the variations in impedance values of microelectrodes on neural probe due to different process variations.
Keywords
Neural probe; Equivalent circuit modeling; Fabrication process variation;
Citations & Related Records
Times Cited By KSCI : 2  (Citation Analysis)
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