Improvement of Maskless Photolithography of Bio Pattern with Single Crystalline Silicon Micromirror Array |
Jang, Yun-Ho
(Image Development Team, Samsung Electronic Co., Ltd.)
Lee, Kook-Nyung (Korea Electronics Technology Institute) Park, Jae-Hyoung (Department of Physics, Ewha Womans University) Shin, Dong-Sik (School of Chemical and Biological Engineering, Seoul National University) Lee, Yoon-Sik (School of Chemical and Biological Engineering, Seoul National University) Kim, Yong-Kweon (School of Electrical Engineering and Computer Science, Seoul National University) |
1 | S. Singh-Gasson, R. Green, Y. Yue, C. Nelson, F. Blattner, M. R. Sussman and F. Cerrina, 'Maskless fabrication of light-directed oligonucleotide microarrays using a digital micromirror array' Nature Biotechnol., vol. 17, pp. 974–78, 1999 |
2 | I. W. Jung, J. S. Wang, and O. Solgaard, 'Spatial light modulators for maskless lithography' in Proc. IEEE Int. Conf. on MOEMS'6, Montana, U.S.A., Aug. 21- 24 2006, pp. 150-151 |
3 | K. N. Lee, D. S. Shin, Y. S. Lee and Y. K. Kim, 'Protein patterning by virtual mask photolithography using a micromirror array' J. Micromech. Microeng., vol. 13, no.1, pp.18-25, 2003 DOI ScienceOn |
4 | K. N. Lee, D. S. Shin, Y. S. Lee and Y. K. Kim, 'Micromirror array for protein micro array fabrication' J. Micromech. Microeng., vol. 13, no. 3, pp. 474-481, 2003 DOI ScienceOn |
5 | L.J. Hornbeck, 'Deformable-mirror spatial light modulators,'Spatial Light Modulators and Applications III, SPIE Critical Reviews, vol. 1150, pp. 86-102, 1989 |
6 | Y. H. Jang, K. N. Lee, and Y. K. Kim, 'Characterization of a single-crystal silicon micromirror array for maskless UV lithography in biochip applications' J. Micromech. Microeng., vol. 16, no. 11, pp. 2360-2368, 2006 DOI ScienceOn |
7 | D. S. Shin, K. N. Lee, K. H. Jang, J. K. Kim, W. J. Chung, Y. K. Kim, and Y. S. Lee, 'Protein patterning by maskless photolithography on hydrophilic polymer-grafted surface' Biosens. Bioelectron., vol. 19, pp. 485-494, 2003 DOI ScienceOn |