1 |
R. Maeda and K. Kikuchi, 'Deposition of Thin Films by UV Light Laser Ablation,' Surface Engineer. 13, 1,71 (1997)
|
2 |
W. M. Lin, K. Kikuchi, A. Schroth, S. Matsumoto, and R. Maeda, 'Development of Micromachined Scanning Beams and Mirrors Actuated by Eximer Laser Ablation Deposited PZT Thin Films,' Proc. 3rd Intern. Conf. Micro Opto Mechanical Systems, Mainz,1999
|
3 |
Z. Wang, M. Ryutaro, and K. Kikuchi, 'Preparation and Characterization of Sol-Gel Derived PZT Thin Films for Micro-Actuators', T. IEE Japan. 119-E: 4, 254-259 (1999)
|
4 |
S. Okamura, S. Miyata, Y. Mizutani, T. Nishida, and T. Shiosaki, 'Conspicuous Voltage Shift of D-E Hysteresis Loop and Asymmetric Depolarization in Pb-Based Ferroelectric Thin Films,' Jpn. J. Appl. Phys. 38: 5364-5367 (1999)
|
5 |
C. H. Peng and S. B. Desu, 'Metalorganic Chemical Vapor Deposition of Ferroelectric Pb(Zr, Ti) Thin Films', J. Am. Ceram. Soc. 77,1799 (1994)
|
6 |
C. Sudhama, J. Kim, R. Khamankar, V. Chikarmane, and J. C. Lee, 'Thickness-Scaling of Sputtered PZT Films in the 200 nm Range for Memory Applications' J. Electon. Mater. 23, 1261 (1994)
|
7 |
S. B. Krupanidhi, N.Maffei, M. Sayer, and K. El-Assl, 'RF Planar Magnetron Sputtering and Characterization of Ferroelectric Pb(Zr, Ti) Films,' J. Appl. Phys. 54, 6601 (1983)
|
8 |
B. Jaffe, W. R. Cook, and H. Jaffe, Piezoelectric Ceramics(Academic, London, 1971)
|
9 |
A. Umezawa, R. Maeda, A. Schroth, and K. Kikuchi, 'Deposition of PZT thin Films by Eximer Laser Ablation Deposition', J. Mech. Engineer. Laboratory. 52: 2,53 (1998) (in Japanese)
|
10 |
K. Kikuchi, Z. J. Wang, A. Umezawa, and R. Maeda, 'Deposition of PZT Thin Films by Eximer Laser Ablation for Piezoelectric Application,' Ferroelectrics. 224: 267 (1999)
|
11 |
G. A. C. M. Spierings, G. J. M. Dormans, W. G. J. Moors, M. J. E. Ulenaers, and P. K. Larsen, 'Stresses in PT/Pb(Zr, Ti) /Pt thin-film stacks for integrated ferroelectric capacitors' J. Appl. Phys. 78, 1926 (1995)
|
12 |
L.Meidong, L. Chunru, W. Peiying, R. Yunhua, Z. Yike, and L. Churong, 'Preparation of PZT Ferroelectric Thin Films by Sol-Gel Processing and Their Properties', Sens. Actuators A 49, 191 (1995)
|
13 |
J. Lappalainen, J. Frantti, H. Moilanen, and S. Leppavuori, 'Eximer Laser Ablation of PZT Thin Films on Silicon Cantilever Beams', Sens. Actuators A 46,47, 104 (1995)
|
14 |
N. Braithwaite and G. Weaver, Electronic Materials (Butterworth Scientific Ltd., London, 1990), p.168
|