The Fabrication and Characteristics of the Pyroelectric IR Sensor using P(VDF/TrFE) Thin Films Fabricated by the Spin Coating Technique

The pyroelectric sensor of P(VDF/TrFE) film as sensing materials has been fabricated and evaluated with another commercial pyroelectric sensor using ceramic materials for sensing, The device was mounted in TO-5 housing to detect infrared light of a 5.5~14 ${\mu}{\textrm}{m}$ wavelength. The NEP(noise equivalent power) and specific detectivity D* of the device were 2.13$\times$10$^{-8}$ W and 9.37 10$^{6}$ cm/W under emission energy of 13 ㎼/$\textrm{cm}^2$, respectively.