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Detection of Blood Agent Gas Using $SnO_2$ Thin Film Gas Sensor  

Choi, Nak-Jin (School of Electronic Kyungpook National University)
Kwak, Jun-Hyuk (School of Electronic Kyungpook National University)
Lim, Yeon-Tae (School of Electronic Kyungpook National University)
Joo, Byung-Su (School of Electronic Kyungpook National University)
Lee, Duk-Dong (Electrical Engineering, Kyungpook National University)
Bahn, Tae-Hyun (Department of Sensor Engineering, Kyungpook National University)
Publication Information
Journal of Korean Society for Atmospheric Environment / v.20, no.E2, 2004 , pp. 69-75 More about this Journal
Abstract
In this study, thin film gas sensor based on tin oxide was fabricated to examine its characteristics. Target gas is acetonitrile ($CH_3$CN) which is a blood simulant for the chemical warfare agent. Sensing materials are SnO$_2$ SnO$_2$/Pt, and Sn/Pt with thickness from 1000 to 3000 $\AA$. The sensor consists of a sensing electrode with inter-digit (IDT) type in front side and a heater in rear side. Resistance changes of sensing materials are monitored on real time basis using a data acquisition board with a 12-bit analog to digital converter. Sensitivities are measured at different operating temperatures also with different gas concentrations and film thickness. The high sensitivity is obtained for Sn (3000 $\AA$)/Pt (30 $\AA$) at 30$0^{\circ}C$ for 3 ppm. Response and recovery times were about 40 and 160 s, respectively. Repetition measurements showed very good results with $\pm$3% in full scale range.
Keywords
$SnO_2$; Thin film; $CH_3CN$; Blood agent gas;
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