Browse > Article
http://dx.doi.org/10.14773/cst.2013.12.3.119

High-temperature Oxidation of Nano-multilayered AlTiSiN Thin Films deposited on WC-based carbides  

Hwang, Yeon Sang (School of Advanced Materials Science and Engineering, Sungkyunkwan University)
Lee, Dong Bok (School of Advanced Materials Science and Engineering, Sungkyunkwan University)
Publication Information
Corrosion Science and Technology / v.12, no.3, 2013 , pp. 119-124 More about this Journal
Abstract
Nano-multilayered, crystalline AlTiSiN thin films were deposited on WC-TiC-Co substrates by the cathodic arc plasma deposition. The deposited film consisted of wurtzite-type AlN, NaCl-type TiN, and tetragonal $Ti_2N$ phases. Their oxidation characteristics were studied at 800 and $900^{\circ}C$ for up to 20 h in air. The WC-TiC-Co oxidized fast with large weight gains. By contrast, the AlTiSiN film displayed superior oxidation resistance, due mainly to formation of the ${\alpha}-Al_2O_3$-rich surface oxide layer, below which an ($Al_2O_3$, $TiO_2$, $SiO_2$)-intermixed scale existed. Their oxidation progressed primarily by the outward diffusion of nitrogen, combined with the inward transport of oxygen that gradually reacted with Al, Ti, and Si in the film.
Keywords
AlTiSiN thin films; WC carbides; oxidation; $Al_2O_3$ oxide;
Citations & Related Records
Times Cited By KSCI : 1  (Citation Analysis)
연도 인용수 순위
1 I. Milosev, H. H. Strehblow and B. Navinsek, Thin Solid Films, 303, 246 (1997).   DOI   ScienceOn
2 H. Ichimura and A. Kawana, J. Mater. Res., 8, 1093 (1993).   DOI   ScienceOn
3 S. H. Yao, Y. L. Su, W. H. Kao and T. H. Liu, Tribol. Int., 39, 332 (2006).   DOI   ScienceOn
4 D. G. Kim, T. Y. Seong and Y. J. Baik, Thin Solid Films, 397, 203 (2001).   DOI   ScienceOn
5 Y. H. Jeong, D. M. Kwang, C. H. Chung, W. G. Kim and H. C. Choe, Corros. Sci. Tech., 10, 212 (2011).
6 W. D. Munz, J. Vac. Sci. Technol., A4, 2695 (1986).
7 D. McIntyre, J. E. Greene, G. Hakansson, J. E. Sundgren and W. D. Munz, J. Appl. Phys., 67, 1542 (1990).   DOI
8 L. Rebouta, F. Vaz, M. Andritschky and M. F. Da Silva, Surf. Coat. Technol., 70, 76 (1995).
9 F. Vaz, L. Rebouta, M. Andritschky, M. F. Da Silva and J. C. Soares, Surf. Coat. Technol., 98, 912 (1998).   DOI   ScienceOn
10 A. Vennemann, H. R. Stock, J. Kohlscheen, S. Rambadt and G. Erkens, Surf. Coat. Technol., 408, 174 (2003).
11 M. Pfeiler, J. Zechner, M. Penoy, C. Michotte, C. Mitterer and M. Kathrein, Surf. Coat. Technol., 203, 3104 (2009).   DOI   ScienceOn
12 Y. Y. Chang and S. M. Yang, Thin Solid Films, 518, s34 (2010).   DOI   ScienceOn
13 M. Parlinska-Wojtan, A. Karimi, O. Coddet, T. Cselle and M. Morstein, Surf. Coat. Technol., 344, 188 (2004).
14 A. Flink, J.M. Andersson, B. Alling, R. Daniel, J. Sjolen, L. Karlsson and L. Hultman, Thin Solid Films, 517, 714 (2008).   DOI   ScienceOn
15 N. Fukumoto, H. Ezura and T. Suzuki, Surf. Coat. Technol., 204, 902 (2009).   DOI   ScienceOn
16 Y. Tanaka, N. Ichimiya, Y. Onishi and Y. Yamada, Surf. Coat. Technol., 215, 146 (2001).
17 O. Durand-Drouhin, A. E. Santana, A. Karimi, V. H. Derflinger and A. Schutze, Surf. Coat. Technol., 260, 163 (2003).
18 P. J. Martin, A. Bendavid, J. M. Cairney and M. Hoffman, Surf. Coat. Technol., 200, 2228 (2005).   DOI   ScienceOn
19 S. Q. Wang, L. Chen, B. Yang, K. K. Chang, Y. Du, J. Li and T. Gang, Int. J. Refract. Met. Hard Mater., 28, 593 (2010).   DOI   ScienceOn
20 Y. Y. Chang, J. Nanosci. Nanotechno., 10, 4762 (2010).   DOI   ScienceOn
21 I. Barin, Thermochemical Data of Pure Substances, VCH, Weinhein, Germany (1989).
22 S. K. Kim, P. V. Vinh, J. H. Kim and T. Ngoc, Surf. Coat. Technol., 200, 1391 (2005).   DOI   ScienceOn
23 N. Birks, G. H. Meier and F. S. Pettit, Introduction to the High-Temperature of Metals, 2nd ed, Cambridge University Press, England (2006).
24 P. Kofstad, Oxid. Met., 44, 3 (1995).   DOI   ScienceOn
25 H. Holleck, J. Vac. Sci. Technol., A4, 2661 (1986).