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Sub-micron Control Algorithm for Grinding and Polishing Aspherical Surface  

Kim, Hyung-Tae (Mechatronics Team, Korea Institute of Industrial Technology)
Yang, Hae-Jeong (Dept. of Mechanical Design Engineering, Korea Poly-technique University)
Kim, Sung-Chul (Research Center, AM Technology)
Publication Information
International Journal of Control, Automation, and Systems / v.6, no.3, 2008 , pp. 386-393 More about this Journal
Abstract
A position control method for interpolating aspherical grinding and polishing tool path was reviewed and experimented in a nano precision machine. The position-base algorithm was reformed from the time-base algorithm, proposed in the previous study. The characteristics of the algorithm were in the velocity control loop with position feedback. The aspherical surface was divided by an interval at which each velocity and acceleration were calculated. The theoretical velocity was corrected by position error during processing. In the experiment, a machine was constructed and nano-scale linear encoders were installed at each axis. Relation between process parameters and the variation of position error was monitored and discussed. The best result from optimized parameters showed that the accuracy was 150nm and improved from the previous report.
Keywords
Aspherical polishing; micro lenses; surface grinding; synchronized motion control; tool path generation; 2D interpolation;
Citations & Related Records
Times Cited By KSCI : 1  (Citation Analysis)
Times Cited By Web Of Science : 0  (Related Records In Web of Science)
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