Browse > Article

A Review on Cooling Technologies for Micro and Miniature Devices and Systems  

Yoon, Jae-Sung (School of Mechanical and Aerospace Engineering, Seoul National University)
Choi, Jong-Won (School of Mechanical and Aerospace Engineering, Seoul National University)
Kim, Min-Soo (School of Mechanical and Aerospace Engineering, Seoul National University)
Publication Information
International Journal of Air-Conditioning and Refrigeration / v.15, no.2, 2007 , pp. 70-77 More about this Journal
Abstract
As electric and mechanical devices have been miniaturized and highly integrated, heat generation per unit volume has been greatly increased. Therefore, effective cooling methods for micro and miniature systems have emerged as critical issues nowadays and a lot of studies have been carried out to find an optimum cooling strategy. This paper reviews recent researches on the cooling technologies which are mainly based on micro-fabrication processes. Design, development, experiments and numerical analysis of various cooling devices are discussed and their characteristics, problems and advantages are compared.
Keywords
Micro-electro-mechanical system (MEMS); Microchannel; Micro miniature refrigeration system (MMR); Micropump; Micro heat pipe;
Citations & Related Records
연도 인용수 순위
  • Reference
1 Bowers, M. B. and Mudawar, I., 1994, High flux boiling in low flow rate, low pressure drop mini -channel and micro-channel heat sinks, Int. J. Heat Mass Transfer, Vol. 37, No.2, pp.321-332   DOI   ScienceOn
2 Kulkarni, T., Bullard, C. W., and Cho, K., 2004, Header design tradeoffs in microchannel evaporators, Applied Thermal Engineering, Vol. 24, pp. 759-776   DOI   ScienceOn
3 Khrustalev, D. and Faghri, A., 1996, Estimation of the maximum heat flux in the inverted meniscus type evaporator of a flat miniature heat pipe, Int. J. Heat Mass Transfer, Vol. 39, No.9, pp. 1899-1909   DOI   ScienceOn
4 Peterson, G. P., Duncan, A. B., and Weichold, M. H., 1993, Experimental investigation of micro heat pipes fabricated in silicon wafers, J. Heat Trans., Vol. 115, pp.751-756   DOI   ScienceOn
5 Stehr, M., Messner, S., Sandmaier, H., and Zengerle, R., 1996, The VAMP-a new device for handling liquids or gases, Sensors and Actuators A, Vol. 57, pp. 153-157   DOI   ScienceOn
6 Yoon, J. S., Choi, J. W., and Kim, M. S., 2006, A study on the micro vapor compressor based on microfabrication process for the application to the micro miniature refrigeration system, Proc. of the SAREK 2006 Summer Annual Conference, June 21-23, 2006, Pyongchang, Korea, pp.477-482
7 Bapat, S. L., 2000, Theoretical investigations on simultaneous operation of vapour compression refrigeration cycle and Stirling cycle in miniature Stirling cooler with two-component two-phase mixture, Cryogenics, Vol. 40, pp.1-8   DOI   ScienceOn
8 Holland, H. J., Burger, J. F., Boersma, N., ter Brake, H. J. M., and Rogalla, H., 1998, Miniature 10-150 mW Linde-Hampson cooler with glass-tube heat exchanger operating with nitrogen, Cryogenics, Vol. 38, No.4, pp.407-410   DOI   ScienceOn
9 Zhang, L., Koo, J. M., Jiang, L., Banerjee, S. S., Ashegi, M., Goodson, K. E., Santiago, J. G., and Kenny, T. W., 2000, Measurement and modeling of two-phase flow in micro-channels with nearly-constant heat flux boundary conditions, in: A. Lee et al. (Eds.), Micro-electro-mechanical Systems (MEMS) 2000, MEMS-Vol. 2, ASME, Orlando, FL, pp. 129-135
10 Tonomura, O., Tanaka, S., Noda, M., Kano, M., Hasebe, S., and Hashimoto, I., 2004, CFD-based optimal design of manifold in plate-fin microdevices, Chemical Engineering Journal, Vol. 101, pp.397-402   DOI   ScienceOn
11 Ameel, T. A., Warrington, R. O., Wegeng, R. S., and Drost, M. K., 1997, Miniaturization technologies applied to energy systems, Energy Convers. Mgmt., Vol. 38, No. 10-13, pp. 969-982
12 Peles, Y. P. and Haber, S., 2000, A steady state, one dimensional, model for boiling two phase flow in triangular micro-channel, Int. J. Multiphase flow, Vol. 26, pp. 1095-1115   DOI   ScienceOn
13 Qu, W. and Mudawar, I., 2002, Transport phenomena in two-phase micro-channel heat sinks, Proceedings of IMECE2002, ASME International Mechanical Engineering Congress & Exposition, New Orleans, Louisiana, November 17-22, IMECE2002-33711
14 Gromoll, B., 1998, Micro cooling systems for high density packaging, Rev. Gen. Therm., Vol. 37, pp.781-787   DOI   ScienceOn
15 Peng, X. F. and Wang, B. X., 1998, Forced-convection and boiling characteristics in microchannels, Proceedings of 11th IHTC, Kyongju, Korea, August 23-28, Vol. 1, pp. 371-390
16 Maziuk, V., Kulakov, A., Rabetsky, M., Vasiliev, L., and Vukovic, M., 2001, Miniature heat-pipe thermal performance prediction tool-software development, Applied Thermal Engineering, Vol. 21, pp.559-571   DOI   ScienceOn
17 Darabi, J. and Ekula, K., 2003, Development of a chip-integrated micro cooling device, Microelectronics J., Vol. 34, pp. 1067-1074   DOI   ScienceOn
18 Launay, S., Sartre, V., and Lallemand, M., 2004, Experimental study on silicon micro-heat pipe arrays, Applied Thermal Engineering, Vol. 24, pp.233-243   DOI   ScienceOn
19 Murer, S., Lybaert, P., Gleton, L., and Sturbois, A., 2005, Experimental and numerical analysis of the transient response of a miniature heat pipe, Applied Thermal Engineering, Vol. 25, pp. 2566-2577   DOI   ScienceOn
20 Schabmueller, C. G. J., Koch, M., Mokhtari, M. E., Evans, A. G. R., Brunnschweiler, A., and Sehr, H., 2002, Self-aligning gas/liquid micropump, J. Micromech. Microeng., Vol. 12, pp, 420-424   DOI   ScienceOn
21 Drost, M. K., Friedrich, M., Martin, C., Martin, J., and Hanna, B., 1999, Mesoscopic heat-actuated heat pump development, Proc. of ASME Advanced Energy Systems Division, November 14-19, 1999, Nashville, U.S.A, pp. 9-14
22 Organ, A. J., 1999, The miniature, reversed Siirling cycle cryo-cooler: integrated simulation of performance, Cryogenics, Vol. 39, pp. 253-266   DOI   ScienceOn
23 Yoo, J. H., Hong, J. I., and Cao, W., 2000, Piezoelectric ceramic bimorph coupled to thin metal plate as cooling fan for electronic devices, Sensors and Actuators, Vol. 79, pp.8-12   DOI   ScienceOn
24 Ryu, J. H., Choi, D. H., and Kim, S. J., 2003, Three-dimensional numerical optimization of a manifold microchannel heat sink, Int. J. Heat Mass Transfer, Vol. 46, pp. 1553-1562   DOI   ScienceOn
25 Nika, P., Bailly, Y., Jeannot, J. C., and Labachelerie, M. D. 2003, An integrated pulse tube refrigeration device with micro exchangers: Design and experiments, Int. J. Thermal Sciences, Vol. 42, pp. 1029-1045   DOI   ScienceOn
26 Peng, X. F. and Peterson, G. P., 1996, Convective heat transfer and flow friction for water flow in microchannel structures, Int. J. Heat Mass Transfer, Vol. 39, No. 12, pp. 2599-2608   DOI   ScienceOn
27 Qu, W. and Mudawar, I., 2002, Prediction and Measurement of incipient boiling heat flux in micro-channel heat sinks, Int. J. Heat Mass Transfer, Vol. 45, pp.3933-3945   DOI   ScienceOn
28 Berre, M. Le, Pandraud, G., Morfouli, P., and Lallemand, M., 2006, The performance of micro heat pipes measured by integrated sensors, J. Micromech. Microeng, Vol. 16, pp. 1047-1050   DOI   ScienceOn
29 Narayanan, S. P. and Venkatarathnam, G., 1999, Analysis of performance of heat exchangers used in practical micro miniature refrigerators, Cryogenics, Vol. 39, pp.517-527   DOI   ScienceOn
30 Hetsroni, G., Mosyak, A., and Segal, Z., 2001, Nonuniform temperature distribution in electronic devices cooled by flow in parallel microchannels, IEEE Transactions on components and packaging technologies, Vol. 24, No.1, pp. 16-23   DOI   ScienceOn
31 Richter, M., Linnemann, R., and Woias, P., 1998, Robust design of gas and liquid micro-pumps, Sensors and Actuators A, Vol. 68, pp. 480-486   DOI   ScienceOn
32 Berre, M. Le, Launay, S., Sartre, V., and Lallemand, M., 2003, Fabrication and experimental investigation of silicon micro heat pipes for cooling electronics, J. Micromech. Microeng, Vol. 13, pp. 436-441   DOI   ScienceOn
33 Thome, J. R., Dupont, V., and Jacobi, A. M., 2004, Heat transfer model for evaporation in microchannels. Part I: presentation of the model, Int. J. Heat Mass Transfer, Vol. 47, pp. 3375-3385   DOI   ScienceOn
34 Commenge, J. M., Falk, L., Corriou, J. P., and Matlosz, M., 2002, Optimal design for flow uniformity in microchannel reactors, AIChE Journal, Vol. 48, No.2, pp.345-358   DOI   ScienceOn
35 Lin, L., Ponnappan, R., and Leland, J., 2002, High performance miniature heat pipe, Int. J. Heat Mass Transfer, Vol. 45, pp. 3131-3142   DOI   ScienceOn
36 Selby, J. C., Shannon, M. A., Xu, K., and Economy, J., 2001, Sub-micrometer solid-state adhesive bonding with aromatic thermosetting copolyesters for the assembly of polyimide membranes in silicon-based devices, J. Micromech. Microeng., Vol. 11, pp. 672-685   DOI   ScienceOn
37 Hetsroni, G., Mosyak, A., Segal, Z., and Pogrebnyak, E., 2003, Two-phase flow patterns in parallel micro-channels, International Journal of Multiphase Flow, Vol. 29, pp.341-360   DOI   ScienceOn
38 Choi, C., Ko, J., and Jeong, S., 2004, Experimental study on the development of micro sorption refrigerator, Proc. of the SAREK 2004 Winter Annual Conference, November 24, 2004, Seoul, Korea, pp. 602-606
39 Munkejord, S. T., Mehlum, H. S., Zakeri, G. R., Neksa, P., and Pettersen, J., 2002, Micro technology in heat pumping systems, Int. J. Refrigeration, Vol. 25, pp. 471-478   DOI   ScienceOn
40 Yoon, J. S. and Kim, M. S., 2005, Performance analysis of a silicon-based micropump for gases, Proc. of The Sixth KSME-JSME Thermal and Fluids Engineering Conference, March 20-23, 2005, Jeju, Korea, Paper No. CJ02
41 Wu, X. Y. and Cheng, P., 2003, Visualization and measurements of periodic boiling in silicon microchannels, Int. J. Heat Mass Transfer, Vol. 46, pp.2603-2614   DOI   ScienceOn