Browse > Article
http://dx.doi.org/10.33768/ksue.2018.18.4.503

Emission Characteristics of VOCs Distributions in Semiconductor Workplace  

Lee, Jeong Joo (Department of Occupational & Environmental Health, Yong-In University)
Publication Information
Journal of the Korean Society of Urban Environment / v.18, no.4, 2018 , pp. 503-509 More about this Journal
Abstract
In this study, a Proton-Transfer Reaction-Time-of-Flight Mass spectrometer (PTR-TOF-MS) was used for the continuous monitoring of Volatile Organic Compounds (VOCs) emitted from semiconductor workplace such as photolithography (PHOTO), flat panel display (FPD), organic light emitting diode (OLED), etching (WET) process. The averaged VOCs mixing ratio in the such workplace, PHOTO was 6.5 ppm, FPH was 6.4 ppm, WET was 2.0 ppm and OLED was 1.3 ppm, respectively. The abundance of VOCs in the workplace were methyl ethyl ketone (MEK) with 2.8 ppm (69%) and acetaldehyde with 0.5 ppm (13.2%). Depending on the semiconductor process characteristics, various VOCs have been observed in the workplace. The VOCs mixing ratio are lower than the workplace regulation standard (TWA), it is necessary to continuously monitor and effectively manage these VOCs.
Keywords
Semiconductor; Workplace; VOCs; Proton Transfer Reaction-Time of Flight Mass Spectrometer (PTR-ToFMS);
Citations & Related Records
연도 인용수 순위
  • Reference
1 산업안전보건연구원, "반도체 제조 사업장에 종사하는 근로자의 작업환경 및 유해요인 노출특성 연구" (2012).
2 Lobert, J. M., Cate, P. W., Ruede, D. J., Wildgoose, J. R., Miller, C. M., and Gaudreau, J. C., "Advances in the understanding of low molecular weight silicon formation and implications for control by AMC filters," Proceeding SPIE, 7638, 763832 (2010).
3 박승명, 박종성, 송인호, 신혜정, 홍유덕, 김정호, "서울지역 2014년 6월 산화성 VOCs와 $PM_{1.0}$ 유기성분의 산화 특성 연구," 한국도시환경학회지, 15(3), 207-218 (2015).
4 김정호, 윤관훈, Lukas Mark, 이정주, 박종성, 안준영, 한진석, 김신도, "주류 및 지류 담배연기의 실시간 질량스펙트럼 비교에 관한 연구," 한국도시환경학회지, 13(2), 117-127 (2013).
5 Pic, N, Martin, C., Vitalis, M., Calarnou, T., Camlay, D., Grosjean, C., Lanier, A., Kames, J., Acksel, A., and Galvez, C., "Defectivity decrease in the photolithography pro-cess by AMC level reduction through implementation of novel filtration and monitoring solutions," Proceeding SPIE, 7638, 76380M (2010).
6 Hayeck, N., Temime-Toussel, B., Gligorovski, S., Mizzi, A., Gemayel, R., Tlili, S., Maillot, P., Pic, N., Vitrani, T., Poulet, I., and Wortham, H., "Monitoring of organic contamination in the ambient air of microelectronic clean room by proton-transfer reaction/time-of-flight/mass spectrometry (PTR-ToF-MS)," International Journal of Mass Spectrometry, 392, 102-110 (2015).   DOI
7 Andrew M. Ellis and Christopher A. Mayhew, "Proton Transfer Reaction Mass Spectrometry," John Wiley & Sons, United Kingdom, 90-95 (2014).
8 김정호, 박진수, 민철현, 김소영, 윤관훈, 김신도, "반도체 제조공정에서 양자전이 비행시간 질량분석기를 이용한 Trimethylsilanol 분석방법에 대한 연구," 한국도시환경학회지, 17(1), 85-95(2017).
9 Simon B N Thompson, Implications for cognitive rehabilitation and brain injury from exposure to methyl ethyl ketone (MEK): A Review, The Journal of Cognitive Rehabilitation, 4-11 (2011).
10 김기준, 윤영삼, 이진선, 박현주, 서석준, 윤준헌, 석광설, 최경희, "PTR-TOF-MS를 이용한 화학사고 원인물질 분석연구-에폭시와 아크릴산 이상반응에 의한 사고사례," 한국환경분석학회지, 17(1), 21-28 (2014).
11 Schade, G. W. and Goldstein, A. H., "Seasonal measurement of acetone and methanol : Abundances and implications for atmospheric budgets," Global Biogeochemical Cycles, 20, GB1011, doi:10.1029/2005GB002566 (2006).   DOI
12 Park, S., Kim, J., Lee, G., Lee, M., Kang, C., and Sunwoo, Y., "Characteristics of the major atmospheric aromatic hydrocarbons in the Yellow sea," Asian Journal of Atmospheric Environment, 9-1, 57-65 (2015).   DOI