Reviews on Adsorption and Catalyst Technology for Removal of Hazardous Substances from Semiconductor Process |
Yoon, Seong-Jin
(Department of Chemical and Biological Engineering, Hanbat National University)
Kim, Yu-Jin (Department of Chemical and Biological Engineering, Hanbat National University) Kang, Yu-Jin (Department of Chemical and Biological Engineering, Hanbat National University) Jang, Min-Hyeok (Department of Chemical and Biological Engineering, Hanbat National University) Jo, Hyung-Kun (Department of Chemical and Biological Engineering, Hanbat National University) Han, Gyoung-Jae (Department of Chemical and Biological Engineering, Hanbat National University) Seo, Dong-Jin (Department of Chemical and Biological Engineering, Hanbat National University) Cho, Hye-Ryeong (Department of Chemical and Biological Engineering, Hanbat National University) Park, Joo-Il (Department of Chemical and Biological Engineering, Hanbat National University) |
1 | Mgbeahuruike, A. C., Ejioffor, T. E., Christian, O. C., Shoyinka, V. C., Karlsson, M. & Nordkvist, E., "Detoxification of Aflatoxin - Contaminated Poultry Feeds by 3 Adsorbents, Bentonite, Activated Charcoal, and Fuller's Earth", Journal of Applied Poultry Research, 27(4), pp. 461~471. (2018). DOI |
2 | Jeong, J. G., "Emission Control Technology of Semiconductor Process", Air Cleaning Technology, 29(4), pp. 19~29. (2016). |
3 | Kim, I. G. and Yun, S. J., "Cleanroom Gas Removal Technology Using Chemical Filters.", Air Cleaning Technology, 31(4), pp. 34~45. (2018). |
4 | Ahn, N. G., Kang, S. W., Min, B. H., & Suh, S. S., "Adsorption Isotherms of Tetrafluoromethane and Hexafluoroethane on Various Adsorbents", Journal of Chemical & Engineering Data, 51(2), pp. 451~456. (2006). DOI |
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6 | Liu, Y., "Some consideration on the Langmuir isotherm equation, Colloids and Surfaces A: Physicochemical and Engineering Aspects, 274(1-3), pp. 34~36. (2006). DOI |
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8 | Sessa, D. J. and Palmquist, D. E., "Effect of heat on the adsorption capacity of an activated carbon for decolorizing/deodorizing yellow zein", Bioresource Technology, 99(14), pp. 6360~6364. (2007). DOI |
9 | Mondal, P. and George, S., "Removal of Fluoride from Drinking Water Using Novel Adsorbent Magnesia-Hydroxyapatite", Water, Air, & Soil Pollution, 226(8), pp. 1~15. (2015). |
10 | Ramesh, P. S., Biplab, C. and Ranadip, K. D., "A review on adsorption cooling systems with silica gel and carbon as adsorbents", Renewable and Sustainable Energy Reviews, 45, pp. 123~134. (2015). DOI |
11 | CHoi, S. H. and Park, G. H., "Acid-resistant catalysts and applications for decomposition of perfluorinated compounds", KIPO. (2018). |
12 | Park, H. G., Park, N. K., Lee, T. J., Kwon, W. T. & Chang, W. C., "Catalytic Decomposition of SF6 by Hydrolysis over γ - Al2O3 Supported Metal Oxide Catalysts", Clean Technology, 18(1), pp. 83~88. (2012). DOI |
13 | Wang, H. and Luo, P., "Preparation, Kinetics, and Adsorption Mechanism Study of Microcrystalline Cellulose-Modified Bone Char as an Efficient Pb (II) Adsorbent", Water, Air, & Soil Pollution, 231, pp. 1~15. (2020). DOI |
14 | Norouzi, S. H., Badii, K. H. and Doulati Ardejani, F., "Activated bauxite waste as an adsorbent for removal of Acid Blue 92 from aqueous solutions", Water Sci Technol, 62(11), pp. 2491~2500. (2010). DOI |
15 | Ministry of Environment, "Development of advanced eco-friendly treatment system for reducing the NOx, CO, and greenhouse gases emission in semiconductor processing", Sejong: Ministry of Environment. (2011). |
16 | Moon, Y. H. and Kim, D. W., "Catalytic equation of exhaust gas treatment technology", Air Cleaning Technology, 14(3), pp. 39~47. (2001). |
17 | Suh, S. S., Ahn, N. G. and NA, B. K., "Adsorption and desorption characteristics of CF4 on fixed bed column", Korean Journal of Chemical Engineering, 25, pp. 1518~1523. (2008). DOI |
18 | Jun, L., Shen, W. T., Long, Q., Qin, Y. H. & Dai, Y. D., "Carbon Nanotube-Prussian Blue Spongiform Adsorbent for Selective Capture of Cesium and Strontium", Applied Mechanics and Materials, 800, pp. 3~7. (2015). |