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http://dx.doi.org/10.17137/korrae.2022.30.4.51

Reviews on Adsorption and Catalyst Technology for Removal of Hazardous Substances from Semiconductor Process  

Yoon, Seong-Jin (Department of Chemical and Biological Engineering, Hanbat National University)
Kim, Yu-Jin (Department of Chemical and Biological Engineering, Hanbat National University)
Kang, Yu-Jin (Department of Chemical and Biological Engineering, Hanbat National University)
Jang, Min-Hyeok (Department of Chemical and Biological Engineering, Hanbat National University)
Jo, Hyung-Kun (Department of Chemical and Biological Engineering, Hanbat National University)
Han, Gyoung-Jae (Department of Chemical and Biological Engineering, Hanbat National University)
Seo, Dong-Jin (Department of Chemical and Biological Engineering, Hanbat National University)
Cho, Hye-Ryeong (Department of Chemical and Biological Engineering, Hanbat National University)
Park, Joo-Il (Department of Chemical and Biological Engineering, Hanbat National University)
Publication Information
Journal of the Korea Organic Resources Recycling Association / v.30, no.4, 2022 , pp. 51-57 More about this Journal
Abstract
This paper investigated catalytic and adsorption equations among the technologies for removing hazardous substances generated in the semiconductor process. As the semiconductor industry develops, harmful substances used and discharged in the semiconductor process are also increasing. Hazardous substances adversely affect the global environment in terms of atmospheric and water quality. As regulations on the emission of harmful substances are strengthened in the 21st century, it is expected that there will be limitations in industrial development in the future. Therefore, technology for removing harmful substances generated in semiconductor processes is essential. In this paper, the goal is to remove PFCs, which are harmful substances, through adsorption technology and catalyst technology. Descriptions from the semiconductor process to the technology in which harmful substances generated are removed were summarized.
Keywords
Semiconductor process; PFCs; Removal technology; Adsorption; Catalyst;
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Times Cited By KSCI : 1  (Citation Analysis)
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