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Cleaning System Design using Supper Heating Steam  

Cho, Do-Hyeoun (Dept. of Digital Electronics, Inha Tech. Co.)
Publication Information
전자공학회논문지 IE / v.48, no.2, 2011 , pp. 47-51 More about this Journal
Abstract
In this paper, we propose the cleaning process system to remove micro-particles, various impurities, unnecessary residues, etc. for liquid crystal display manufacturing processes. This system is structured with cleaning, rinse and drying process using the chemical cleaning of alkaline water and the physical cleaning of SHS(supper heating steam). And we shows cleaning effects of alkaline water and remove effects of SHS.
Keywords
Cleaning Process; Alkaline water; Glass chip; SHS;
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