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http://dx.doi.org/10.5573/ieie.2014.51.8.023

A Study on Solar Cell Wafer Contamination Diagnostic and Cleaning  

Son, Young-Su (Advanced Manufacturing System Research Dept., KIMM)
Ham, Sang-Yong (Advanced Manufacturing System Research Dept., KIMM)
Chai, Sang-Hoon (Dept. of Electronic Engineering, Hoseo University)
Publication Information
Journal of the Institute of Electronics and Information Engineers / v.51, no.8, 2014 , pp. 23-29 More about this Journal
Abstract
We have studied on ozonate water cleaning mechanisms to apply in manufacturing process of 156 mm silicon wafer which is used in the solar cell fabrication. We have analyzed contamination sources on wafer surface which causes poor quality and performance of products in fabrication process, and examined cleaning process using ozonate water to eliminate it. Contamination sources consist of remaining material like organic matter in slurry and detergent and particles in sawing wire. Using this novel technology it is possible for the solar cell wafer to clean with low cost, high performance, and eco-friendly.
Keywords
오존수;태양전지;웨이퍼;세정 공정;기능수;
Citations & Related Records
Times Cited By KSCI : 3  (Citation Analysis)
연도 인용수 순위
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