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Characteristic Analysis of Al Films Grown on Plastic Substrates and Glass Substrates  

Lee, Myoung-Jae (Dept. of Electronics Engineering, Kyung Hee University)
Kwak, Sung-Kwan (Dept. of Electronics Engineering, Kyung Hee University)
Kim, Dong-Sik (Dept. of Electronics Engineering, Kyung Hee University)
Kim, Jang-Kwon (Dept. of Electronics, Information & Communication Engineers, Daelim College)
Publication Information
Journal of the Institute of Electronics Engineers of Korea TE / v.39, no.2, 2002 , pp. 6-10 More about this Journal
Abstract
Al films (1000~4000${\AA}$)were deposited on glass and polymer(polyethersulfine) plastic substrates by DC-magnetron sputtering for plastic-based flat-panel displays. A stepped heating process was used both to improve the electrical characteristics and to diminish the thermal expansion of the polymer substrates. Following this procedure, we could succeed in sputtering Al films without any cracking or shrinkage of the polymer substrates. The treatment temperatures and deposited process of Al films were under 200$^{\circ}C$. Also, this low temperature fabrication process allows the application of plastic substrates. Scanning Electrom Microscopy, Atomic Force Microscopy, X-ray Dffractometry, and electrical measurements such as resistivity measurements were performed to investigate the properties of deposited the Al films and their reliability. 
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